Method and apparatus for sensing fluids using surface acoustic waves

• US 4,361,026 A
• Filed: 06/24/1980
• Issued: 11/30/1982
• Est. Priority Date: 06/24/1980
• Status: Expired due to Term

• Current Assignee: Muller, Richard S., Richard M. White
• Original Assignee: Muller, Richard S., Richard M. White
• Inventors: White, Richard M., Muller, Richard S.
• Primary Examiner(s): Kreitman, Stephen A.
• Application Number:
  US06/162,604
• Time in Patent Office: 889 Days
• Field of Search: 73/23, 310/313 B, 310/313 R
• US Class Current: 73/24.01
• CPC Class Codes: G01N 2291/0256 Adsorption, desorption, surface mass change, e.g. on biosensors
• CPC Class Codes: G01N 2291/0423 Surface waves, e.g. Rayleigh waves, Love waves
• CPC Class Codes: G01N 2291/0427 Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
• CPC Class Codes: G01N 29/022 Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices microdevices per se B81B

Abstract

This disclosure relates to a method and apparatus for sensing the presence of gases, vapors, and liquids using surface acoustic waves. At the present time the commercially available devices for measuring the presence of fluids, although fast reacting and generally quite accurate, are very expensive and bulky. Further, these devices do not lend themselves to advanced integrated signal processing and digital techniques. This disclosure describes a precise, fluid sensing unit that is small, easily integrated, and relatively inexpensive to fabricate. The apparatus includes a medium on which surface acoustic waves can be propagated, transmitting and receiving transducers, and a sensing member located across the path of the surface acoustic waves. The sensing member has a physical characteristic that varies the velocity and/or the attenuation of the waves when in the presence of the specific fluid being detected. The presence of the fluid is sensed by the apparatus by measuring the variation in the surface acoustic waves resulting from this interaction.

Claims

1. Apparatus for sensing the presence of a specific fluid, comprising:

(a) a substrate in which surface acoustic waves can be propagated, said substrate having a planar top surface and a planar bottom surface opposite thereto;

(b) a transmitting transducer located on said top surface for propagating surface acoustic waves in said substrate along a path;

(c) a receiving transducer located on said top surface for receiving said surface acoustic waves propagated in said substrate along said path; and

(d) a sensing member located on the bottom surface of the substrate in the path of the surface acoustic waves for interacting therewith and having a physical characteristic that varies the surface acoustic waves when in the presence of a specific fluid, said member interacts with the waves so that the presence of the fluid is sensed by the receiving transducer as a variation of the surface acoustic waves.

2. An apparatus as in claim 1 wherein the sensitive member varies the velocity of the surface acoustic waves and including means, connected to the receiving transducer, for measuring the variation in velocity of the waves along the path.

3. An apparatus as in claim 1 including a signal amplifier connected between the transmitting transducer and the receiving transducer, the amplifier forming a surface acoustic wave oscillator circuit with said path and substrate.

4. An apparatus as in claim 1 including a shield mounted on the top surface of the substrate for protecting said transmitting and receiving transducers from damage while said sensing member on the bottom surface of the substrate remains exposed.

5. An apparatus as in claim 1 wherein the planar top and bottom surfaces of the substrate have a separation approximately equal to the wavelength of the surface acoustic waves propagated in the substrate.

6. An apparatus as in claim 1 wherein the substrate is silicon and the surface acoustic waves are propagated in a piezoelectric film deposited thereon.

7. An apparatus as in claim 1 wherein said substrate is silicon, wherein the transducers are connected to the substrate by a piezoelectric film, and wherein the sensing member is located on the substrate out of contact with the piezoelectric film so that the surface acoustic waves are not propagated in the piezoelectric film while interacting with the sensitive member.

8. An apparatus as in claim 1 wherein the substrate is a piezoelectric material and the surface acoustic waves propagate therein.

9. A surface acoustic wave resonator, comprising:

(a) a doubly supported beam in which surface acoustic waves can be propagated, said beam having two lateral sides each with a sufficient air gap to reflect said waves;

(b) a transducer attached thereto for propagating surface waves laterally across the beam and for reflecting said waves off of said sides; and

(c) means, connected to the transducer, for driving the transducer with a signal having a period equal to an integral multiple of the wavelength of a mode of wave propagation in the beam.

10. An apparatus as in claim 9 wherein said transducer is a single interdigitated transducer located laterally on the beam.

11. An apparatus as in claim 10 wherein said beam is thin compared with the wavelength of the surface wave propagated across the beam.

12. An apparatus as in claim 9 including means, connected to the transducer, for sensing mechanical resonance of the waves propagated in the beam.

13. An apparatus as in claim 9 wherein said beam is thin compared with the wavelength of the surface wave propagated across the beam.

14. Apparatus for sensing the presence of a specific fluid, comprising:

(a) a substrate having a thinned membrane portion, said membrane portion having a planar top surface and a planar bottom surface opposite thereto;

(b) means attached to the top surface of said membrane for vibrating said membrane at mechanical resonance and with a generally drum-head like vibration;

(c) a sensing member located on the bottom surface of said membrane and having a physical characteristic that varies the mechanical resonance of the membrane when in the presence of a specific fluid; and

(d) means for sensing mechanical resonance of the membrane when vibrated.