Film forming method

• US 4,444,635 A
• Filed: 07/21/1982
• Issued: 04/24/1984
• Est. Priority Date: 07/22/1981
• Status: Expired due to Term

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Kobayashi, Shigeru, Nakagawa, Nobuo, Fujimoto, Kazuyuki, Kamei, Tsuneaki, Abe, Katsuo
• Primary Examiner(s): Demers, Arthur P.
• Application Number:
  US06/400,258
• Time in Patent Office: 643 Days
• Field of Search: 204/192 R
• US Class Current: 204/192.15
• CPC Class Codes: C23C 14/3492 Variation of parameters during sputtering
• CPC Class Codes: C23C 14/35 by application of a magnetic field, e.g. magnetron sputtering C23C14/3457 takes precedence
• CPC Class Codes: H01J 37/3408 Planar magnetron sputtering
• CPC Class Codes: H01J 37/3429 Plural materials
• CPC Class Codes: H01J 37/3458 Electromagnets in particular for cathodic sputtering apparatus electromagnets in general H01F7/06

Abstract

A film forming method by plasma sputtering is provided to attain a composite film on a substrate. A target plate having metal materials in a different pattern is prepared in opposition to the substrate. A plasma is created by a planar magnetron sputtering electrode structure. The plasma is shifted magnetically on the target plate by at least three magnetically coupled magnetic poles to deposit the materials into a film with a uniform thickness and a desired composition on the substrate.

Claims

1. A film forming method for forming a film on a substrate comprising the steps of:

preparing a target plate having at least a center region and a second region around said center region of different materials, and

forming a plasma above said target plate for sputtering said materials out of said target plate and depositing onto said substrate, and

controlling excitation current flowing in a solenoid to shift said plasma across a boundary between said two regions in a planar magnetron sputtering structure whereby said film is provided with desired composition of said materials.

2. A film forming method according to claim 1 further comprising a step of heat-treating to form said film of an alloy.

3. A film forming method according to claim 2 wherein said materials include a refractory metal and a Si material and said alloy film is a refractory metal silicide film.

4. A film forming method according to claim 3 wherein said center and second regions are concentric in said target plate.

16. A film forming method for forming a film on a substrate according to claim 3, wherein said first material is silicon and said second material is refractory metal including any one of Mo, Ta, Wo, Cr, Nb, V, Zr, Tc, Ru, Rh, Hf, Ir, Os and Re.

5. A method for forming a refractory metal alloy film on a substrate comprising the steps of:

reciprocatingly shifting a plasma to cross a plurality of metal regions of a refractory metal material and other material in a target by controlling excitation current flowing in a solenoid of a planar magnetron sputtering electrode structure to alternately deposit a refractory material layer and other material layer on the substrate, and

heat-treating said substrate to change said refractory and other material layers into said refractory metal alloy film.

6. A method for forming a refractory metal alloy film according to claim 5, wherein said other metal material is Si.

7. A method for forming a refractory metal alloy film according to claim 6, wherein said refractory material is any one of Mo, Ta, Wo, Cr, Nb, V, Zr, Tc, Ru, Rh, Hf, Ir, Os and Re.

8. A method for forming a refractory metal alloy film accoridng to claim 7, wherein said refractory metal alloy film is refractory metal silicide.

9. A method of forming a film in a planar magnetron sputtering apparatus provided with at least two magnetic field generating means, including at least one solenoid to be energized by a controlled current source, means for magnetically coupling said at least two magnetic field generating means to form an integrated magnetic flux source together with said at least two magnetic field generating means, including a magnetic member bridging said at least two magnetic field generating means and formed of a soft magnetic material, and said at least two magnetic field generating means being disposed on one side of the magnetic coupling means, and means for supplying a controlled current to said at least one solenoid for generating controlled magnetic flux so as to control a ring-like shaped plasma confined in said integrated magnetic flux at least in the neighborhood of said integrated magnetic flux source, said method comprising the steps of:

preparing a target plate having a center region of a first material and a second region of a second material around said center region,

flowing first exciting current in said solenoid to magnetically shift said plasma to a first position substantially above said center region for sputtering mainly said first material,

flowing second exciting current in said solenoid to shift said plasma to a second position substantially above said second region for sputtering mainly said second material whereby said film is provided with alternate layers of mixture of said materials and said film is formed of desired composition of said materials after a heat-treatment.

10. A method of forming a film in a planar magnetron sputtering apparatus according to claim 9, wherein said first and second materials are silicon and refractory metal.

11. A method of forming a film in a planar magnetron sputtering apparatus according to claim 10, wherein a thickness of each of said two layers of the materials deposited alternately is below 500A.

12. A method of forming a film in a planar magnetron sputtering apparatus according to claim 11, further comprising a step of heat-treating said film to change said layers into refractory metal silicide.

13. A film forming method for forming a film on a substrate in a planar magnetron sputtering apparatus provided with at least two magnetic field generating means, including at least one solenoid to be energized by a controlled current source, means for magnetically coupling said at least two magnetic field generating means to form an integrated magnetic flux source together with said at least two magnetic field generating means including a magnetic member bridging said at least two magnetic field generating means and formed of a soft magnetic material, and said at least two magnetic field generating means being disposed on one side of the magnetic coupling means, and means for supplying a controlled current to said at least one solenoid for generating controlled magnetic flux so as to control a plasma confined in said integrated magnetic flux at least in the neighborhood of said integrated magnetic flux source, said method comprising the steps of:

preparing a target plate having a center, a second and a third region, each of which being arranged concentrically in the order thereof, said second region being made of a material different from that of the other regions, flowing first exciting current in said solenoid to magnetically shift said plasma to a first position substantially above said center region for sputtering mainly said first material,

flowing second exciting current in said solenoid to shift said plasma to a second position substantially above said second region for sputtering mainly said second material, and

flowing third exciting current in said solenoid to shift said plasma to a position substantially above said third region for sputtering mainly said third material, whereby said substrate is provided with repetitive layers of said materials and said film has desired composition of said materials after a heat-treatment.

14. A film forming method according to claim 13 wherein said third material is same as said first material.

15. A film forming method for forming a film on a substrate in a planar magnetron sputtering apparatus provided with at least two magnetic field generating means, including at least one solenoid to be energized by a controlled current source, means for magnetically coupling said at least two magnetic field generating means to form an integrated magnetic flux source together with said at least two magnetic field generating means including a magnetic member bridging said at least two magnetic field generating means and formed of a soft material, and said at least two magnetic field generating means being disposed on one side of the magnetic coupling means, and means for supplying a controlled current to said at least one solenoid for generating controlled magnetic flux so as to control a plasma confined in said integrated magnetic flux at least in the neighborhood of said integrated magnetic flux source, said method comprising the steps of:

preparing a target plate having a center, a second and a third region, each of which being arranged concentrically in the order thereof, said center and third regions being formed of a first material,

said second region being formed of a second material different from said first material,

flowing a first exciting current in said solenoid to magnetically shift said plasma to a first position above a first boundary between said center and second regions for sputtering both of said two materials, and

flowing second exciting current in said solenoid to shift said plasma to a second position above a second boundary between said second and third regions for sputtering both of said two materials, whereby said film is provided with a uniform thickness of said two materials.