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Method of making an electrochemical sensing cell

  • US 4,534,825 A
  • Filed: 03/09/1984
  • Issued: 08/13/1985
  • Est. Priority Date: 03/10/1980
  • Status: Expired due to Term
First Claim
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1. A method of making a sensing cell for a chemically sensitive probe for measuring the properties of biological fluids in vivo, comprising the steps ofproducing a wafer comprising an ISFET with spaced source and drain regions spanned by an ion-sensitive gate portion,covering said source and drain regions and gate portion of said ISFET with a temporary first layer of soluble material,covering said temporary first layer with a second layer of relatively insoluble material,defining an opening in said second layer directly above said gate region, andremoving said temporary first layer which covers the source and drain regions and the gate portion by introducing a solvent through said opening to dissolve said first layer, thus forming a sensing chamber encompassing the source and drain regions as well as the gate portion of said ISFET.

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