Cooled mirror and method of cooling same particularly useful in lasers

• US 4,552,439 A
• Filed: 10/21/1983
• Issued: 11/12/1985
• Est. Priority Date: 11/01/1982
• Status: Expired due to Fees

• Current Assignee: Metalworking Lasers International Limited Atidin Science-Based Industrial Park NEVE Sharett Tel-Aviv 61 131 Israel
• Original Assignee: Metalworking Lasers International Ltd.
• Inventors: Hoag, Ethan D., Ravid, Amotz
• Primary Examiner(s): Corbin, John K.
• Assistant Examiner(s): Ben, Loha
• Application Number:
  US06/544,132
• Time in Patent Office: 753 Days
• Field of Search: 350/609, 350/610
• US Class Current: 359/845
• CPC Class Codes: G02B 7/1815 with cooling or heating systems cooling arrangements for laser mirrors H01S3/0401
• CPC Class Codes: H01S 3/0401 of optical elements being part of laser resonator, e.g. windows, mirrors, lenses

Abstract

A cooled mirror particularly useful in lasers conducts a cooling fluid through a plurality of parallel paths to impinge on the underface of the reflector member at a plurality of discrete points thereon. The velocity of the cooling fluid is increased such that it issues in the form of a high-velocity jet at each of the discrete impingement points on the underface of the reflector member. The reflector member is thin and flexible and is supported from a rigid base by a plurality of spaced supporting elements in such manner so as to reduce bending of the reflector member by thermal deformation.

Claims

1. A cooled mirror particularly useful in lasers, comprising a reflector member, a rigid base, a plurality of spaced supporting elements joined to the underface of said reflector member and to said base such as to reduce bending of said reflector member by thermal deformation, and cooling means for cooling said reflector member;

characterized in that said cooling means comprises an inlet for a cooling fluid, an outlet for the cooling fluid, and fluid-conducting means constraining the cooling fluid to flow from said inlet, through the spaces between said plurality of spaced supporting elements along a plurality of paths which are in parallel between said inlet and outlet, and then through said outlet to impinge on the underface of said reflector member at a plurality of discrete points thereon each located in one of said parallel paths.

2. The cooled mirror according to claim 1, wherein said fluid-conducting means increases the velocity of said cooling fluid in each of said parallel paths so as to form high-velocity jets when impinging on the underface of said reflector member at the plurality of discrete points thereon.

3. The cooled mirror according to claim 1, wherein there are a plurality of said parallel paths of cooling fluid and discrete impingement points per cm² of said reflector member.

4. The cooled mirror according to claim 1, wherein said fluid-conducting means comprises passageways through said plurality of spaced supporting elements, the latter being in the form of hollow tubes, said hollow tubes being further formed with holes through the walls adjacent to their ends where joined to the underface of said reflector member.

5. The cooled mirror according to claim 1, further including a plurality of heat-conductor bars joined to the underface of said reflector member and extending in the spaces between said supporting elements.

6. The cooled mirror according to claim 1, wherein said rigid base includes a partition defining on one side an inlet chamber for the cooling fluid, and on the opposite side an outlet chamber for the cooling fluid.

7. The cooled mirror according to claim 6, wherein said spaced supporting elements are hollow tubes defining passageways for the flow of the cooling fluid therethrough, said hollow tubes passing through and being fixed within said partition.

8. The cooled mirror according to claim 6, wherein said spaced supporting elements are solid pegs mounted to the base and passing through holes in said partition, which holes are of slightly larger cross-sectional area than the pegs so as to provide passageways between them for conducting the cooling fluid to flow in the form of high-velocity annular jets to impinge the underface of said reflector member at said plurality of discrete points thereon.

9. The cooled mirror according to claim 1, wherein said plurality of supporting elements are in the form of pegs integrally formed with said base.

10. The cooled mirror according to claim 1, wherein said fluid-conducting means comprises:

a plurality of inlet openings through said base between said spaced supporting elements, said inlet openings leading from said inlets to the underface of said reflector member; and

a plurality of outlet openings through said base between said spaced supporting elements, said outlet openings leading from said outlet to the underface of said reflector member.

11. The cooled mirror according to claim 10, wherein said fluid-conducting means comprises:

an inlet header extending through said base and formed with a plurality of spaced, parallel branches perpendicular thereto, each of which branches leads to a line of said inlet openings; and

an outlet header extending through said base and also formed with a plurality of spaced parallel branches perpendicular thereto, each of which branches leads to a line of said outlet openings inbetween said inlet openings.

12. A cooled mirror particularly useful in lasers including a reflector member, a rigid base, a plurality of spaced supporting elements joining said reflector member to said base such as to provide high resistance to thermal deformation tending to produce bending of the reflector member;

heat-conductor bars extending from said reflector member between and spaced from said supporting elements; and

means for feeding a cooling fluid through the spaces between said supporting elements and said heat-conductor bars;

said supporting elements being hollow tubes formed with holes through their walls at their ends adjacent to said reflector member, the opposite ends of said hollow tubes leading to an inlet chamber for said cooling fluid such that the cooling fluid flows from said inlet chamber through the interiors of said hollow tubes in parallel, then through the openings in the walls of the hollow tubes at their ends adjacent to said reflector member, and then through the spaces between the hollow tubes and said heat-conductor bars.

13. The cooled mirror according to claim 12, wherein said holes formed through the walls of said hollow tubes are each of substantially smaller diameter than the internal diameteroof the hollow tubes and together have a total cross-sectional area less than that of the internal diameter of the hollow tube, such that the fluid issues from said holes in the form of high-velocity fluid jets thereby enhancing the cooling effected of said reflector member.

14. A method of cooling a mirror including a reflector, a rigid base, and a plurality of spaced supporting elements joining discrete points on the underface of the reflector with said base such as to reduce bending by defomation of the reflector, characterized in directing a cooling fluid to flow through a plurality of spaced parallel paths to impinge on a face of said reflector at a plurality of discrete points thereon, and increasing the velocity of said fluid in each of said plurality of parallel paths such that the fluid takes the form of high-velocity jets when impinging on the underface of said mirror at said plurality of discrete points thereon.

15. The method according to claim 14, wherein the cooling fluid is directed to flow through a plurality of said parallel paths per cm² of the mirror being cooled.

16. the method according to claim 15, wherein said cooling fluid is a liquid.

17. The method according to claim 14, wherein said cooling fluid is directed to flow through the interior of said plurality of supporting elements, then through holes formed at the ends thereof adjacent to the underface of the reflector being cooled, and then along the exteriors of said plurality of supporting elements.

18. The method according to claim 14, wherein said cooling fluid is directed to flow along the external surfaces of said plurality of supporting elements into direct contact with the plurality of discrete points of the reflector.

19. The method according to claim 14, wherein said cooling fluid is directed to flow through a plurality of inlet openings formed through the base into direct contact with the underface of the reflector, and then through a plurality of outlet openings formed through said base.