Apparatus and method for reducing topographical effects in an auger image

• US 4,638,446 A
• Filed: 05/31/1983
• Issued: 01/20/1987
• Est. Priority Date: 05/31/1983
• Status: Expired due to Fees

• Current Assignee: Physical Electronics USA, Inc. (Ulvac Incorporated)
• Original Assignee: Perkinelmer Incorporated
• Inventors: Palmberg, Paul W.
• Primary Examiner(s): Lall, Parshotam S.
• Assistant Examiner(s): Herndon, H. R.
• Application Number:
  US06/499,596
• Time in Patent Office: 1,330 Days
• Field of Search: 364/498, 364/555, 377/10, 377/11, 377/44, 250/305
• US Class Current: 702/92
• CPC Class Codes: G01N 23/2276 using the Auger effect, e.g. Auger electron spectroscopy [AES]

Abstract

A system for producing an Auger image which is substantially independent of the topographical contour of the sample surface includes at least two counting means. Preferably, the two counting means are adapted to be dedicated counters, one for background incidents and one for signal incidents. The system also includes counter control means for regulating the counting time and the immersion incident energy threshold for each counter.

Claims

1. A system for reducing topographical effects in forming an Auger image by sequentially focusing a primary electron source at points along a line of a raster pattern, said system comprising:

an electron analyzer, said analyzer having means for selectively passing electrons therethrough at a first preselected energy level and at a second preselected energy level, said analyzer producing a signal responsive to the passage therethrough of said electrons;

means for digitizing said signal from said analyzer;

first and second digital counters, each said counter being switchably connected to said digitizing means;

a timer;

control means having first means for connecting said first counter to said digitizing means and for setting said electron analyzer at said first energy level and for activating said timer to determine the time interval to bring the signal in the first counter to a preselected value, and said control means having second means for connecting said second counter to said digitizing means and for setting said electron analyzer at said second energy level to ascertain the signal in the second counter after the lapse of the same time interval;

means for calculating the difference between the count in said first counter and the count in said second counter;

means for displaying said difference in said counters; and

means for refocusing said primary electron source on the next adjacent point along said line of the raster pattern.

2. System as claimed in claim 1 wherein:

said controlling means includes a dedicated computer which interfaces with said display means.

3. A method for reducing topographical effects in forming an Auger image by sequentially focusing a primary electron source at points along a line of a raster pattern, said method comprises the steps of:

digitizing the signal from an electron analyzer;

counting a preselected number of digitized signals while said analyzer passes electrons having less than a first preselected energy;

measuring the time interval required to count said preselected number of digitized signals;

counting, for an equivalent time interval, the number of digitized signals which said analyzer passes having less than a second preselected energy, said second preselected pass energy being greater than said fist preselected pass energy; and

determining the difference between said preselected number of counts and said number of counts of said digitized signals having less than said second preselected pass energy; and

refocusing said primary electron source on the next adjacent point along said line of said raster pattern and repeating said foregoing steps.

4. Method as claimed in claim 3 further comprising:

displaying said determined difference on a video display unit as a function of the intensity thereon.

5. A system for reducing topographical effects in forming an Auger image by sequentially focusing a primary electron source at points along a line of a raster pattern, said system comprising:

an electron analyzer, said analyzer having means for selectively passing electrons therethrough at a first preselected energy level and at a second preselected energy level, said analyzer producing a signal responsive to the passage therethrough of said electrons;

means for digitizing said signals from said analyzer;

first and second digital counters, each said counter being switchably connected to said digitizing means;

control means having first means for connecting said first counter to said digitizing means and for setting said electron analyzer at said first energy level when operating in a first mode, and said control means having second means for connecting said second counter to said digitizing means and for setting said electron analyzer at said second energy level when operating in a second mode, said control means having third means for switching said control means between said first and second modes a plurality of times until said first counter reaches a preselected value;

means for ascertaining the count in said second counter when said first counter reaches said preselected value;

means for calculating the difference between the count in said first counter and the count in said second counter;

means for displaying said difference in said counters; and

means for refocusing said primary electron source on the next adjacent point along said line of the raster pattern.

6. A method for reducing topographical effects in forming an Auger image by sequentially focusing a primary electron source at points along a line of a raster pattern, said method comprises the steps of:

digitizing the signal from an electron analyzer using digitizing means;

connecting a first counter to said digitizing means and setting said electron analyzer at a first energy level when operating in a first mode, and connecting a second counter to said digitizing means and setting said electron analyzer at a second energy level when operating in a second mode;

switching between said first and second modes a plurality of times until said first counter reaches a preselected value;

ascertaining the count in said second counter when said first counter reaches said preselected value;

calculating the difference between the count in said first counter and the count in said second counter;

displaying said difference in counts; and

refocusing said primary electron source on the next adjacent point along said line of the raster pattern and repeating said foregoing steps.