Moisture sensor
First Claim
Patent Images
1. A moisture sensor comprising:
- (a) a solid substrate comprising a piezoelectric element;
(b) a pair of electrodes formed on said substrate; and
(c) a moisture sensitive film formed on at least one of said electrodes, said film comprising;
an inner, plasma-polymerized, highly crosslinked high polymer layer of a hydrophobic organic compound, andan outer surface layer chemically bonded to said inner layer, said outer surface layer comprising an amino-containing highly crosslinked high polymer layer of an organic amino compound formed by plasma polymerization, said outer surface layer having incorporated therein a concentration gradient of ammonium salt-containing hydrophilic groups, decreasing from an exposed surface of said surface layer to said inner layer.
1 Assignment
0 Petitions
Accused Products
Abstract
A moisture sensor having the moisture sensitive film comprising an inner layer in the form of a plasma-polymerized high polymer layer of a hydrophobic organic compound and a surface layer in the form of a plasma-polymerized high polymer layer having incorporated therein a hydrophilic groups of an ammonium salt type, and a process for producing same.
21 Citations
2 Claims
-
1. A moisture sensor comprising:
-
(a) a solid substrate comprising a piezoelectric element; (b) a pair of electrodes formed on said substrate; and (c) a moisture sensitive film formed on at least one of said electrodes, said film comprising; an inner, plasma-polymerized, highly crosslinked high polymer layer of a hydrophobic organic compound, and an outer surface layer chemically bonded to said inner layer, said outer surface layer comprising an amino-containing highly crosslinked high polymer layer of an organic amino compound formed by plasma polymerization, said outer surface layer having incorporated therein a concentration gradient of ammonium salt-containing hydrophilic groups, decreasing from an exposed surface of said surface layer to said inner layer. - View Dependent Claims (2)
-
Specification