Self-contained mobile reprogrammable automation device

• US 4,698,775 A
• Filed: 05/17/1985
• Issued: 10/06/1987
• Est. Priority Date: 05/17/1985
• Status: Expired due to Fees

• Current Assignee: Flexible Manufacturing Systems, Inc.
• Original Assignee: Flexible Manufacturing Systems, Inc.
• Inventors: Krolak, Michael, Koch, George R., Biche, Michael R.
• Primary Examiner(s): Harkcom, Gary V.
• Application Number:
  US06/735,468
• Time in Patent Office: 872 Days
• Field of Search: 364/460-461, 364/478, 364/513, 901/1, 901/46-47, 901/50, 414/265, 414/279, 414/909, 414/920
• US Class Current: 700/218
• CPC Class Codes: B25J 19/005 using batteries, e.g. as a back-up power source
• CPC Class Codes: B25J 19/02 Sensing devices
• CPC Class Codes: B25J 5/007 mounted on wheels
• CPC Class Codes: G05B 2219/31002 Computer controlled agv conveys workpieces between buffer and cell
• CPC Class Codes: G05B 2219/31005 Detect obstacles on path of vehicle
• CPC Class Codes: G05B 2219/33198 Laser, light link, infrared
• CPC Class Codes: G05B 2219/40283 Reservoir with additional material on vehicle with manipulator
• CPC Class Codes: G05D 1/0225 involving docking at a fixed facility, e.g. base station or loading bay parking aids B62D15/027
• CPC Class Codes: G05D 1/024 in combination with a laser lasers per se H01S
• CPC Class Codes: G05D 1/0255 using acoustic signals, e.g. ultra-sonic singals sonar systems designed for anti-collision purposes G01S15/93
• CPC Class Codes: G05D 1/027 comprising intertial navigation means, e.g. azimuth detector inertial navigation G01C21/16; inertial navigation combined with non-inertial navigation instruments G01C21/165
• CPC Class Codes: G05D 1/0272 comprising means for registering the travel distance, e.g. revolutions of wheels measuring distance traversed on the ground by vehicles, e.g. using odometers G01C22/00
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
• CPC Class Codes: Y10S 414/122 Remote control handlers
• CPC Class Codes: Y10S 414/14 Wafer cassette transporting

Abstract

A mobile transport unit for independently operating within an enclosed environment. The transport unit is adapted for carrying a robotic manipulator arm and cargo within the environment, and includes an infrared communications transmitter/receiver for communicating with an extra-vehicular central processing unit. The transport unit includes electric motors for driving and for steering the unit. A laser docking module precisely determines the vehicle'"'"'s location relative to a fixed point within the environment. Ultrasonic sensors placed about the vehicle can detect objects within a preselected range for collision avoidance and safety purposes. The vehicle is controlled by a central computer which receives inputs from the infrared communications system and from on-board sensors including directional sensors, distance measuring sensors, a gyroscope, the ultrasonic sensors, and the docking module. The on-board computer directs the vehicle and the robotic arm based on information received from these inputs, and allows for the continuous operation of the vehicle without recalibration. Power is supplied to the vehicle by an on-board battery pack, and the vehicle is enclosed by a protective skin for reasons of cleanliness and safety, and to prevent turbulent airflow around the wafer cassettes and the robotic arm.

Claims

1. A mobile transport unit comprising:

a chassis, adapted for transporting a robot manipulator arm;

a front and rear wheel means, mounted about the chassis whereby the chassis may freely roll thereon, said front wheel means being mounted to a steering assembly mounted to rotate about a vertical axis, said assembly including a drive motor for supplying rotary motion to said front wheel means, said assembly further including a steering notor for rotating said assembly about said vertical axis whereby a heading of said assembly may be changed, said assembly further including a rotary encoder coupled thereto for supplying positional informational of the assembly relative to a predetermined axis of the transport unit, and a distance encoding means for measuring a vehicle travel distance from a predetermined point, said rear wheel means being independently secured to opposing lateral rear portions of the vehicle;

at least one central control computer means, electronically coupled to said rotary encoder, to said distance encoding means and to said drive and said steering motors;

a diffuse infrared communication means, mechanically attached to the unit and electrically coupled to the computer means and in diffuse infrared communication with an extra vehicular information and control source for directing and controlling the unit;

a laser docking and positioning means for locating a predetermined point of the unit relative to a fixed piece of equipment to and from which the vehicle will shuttle; and

a power supply means coupled to said drive and steering motors, and to said control means and mounted within said chassis.

2. The mobile transport unit of claim 1 and further including:

a gyroscope, coupled to said steering assembly and electrically coupled to said conttol means, the gyroscope being adapted to determine a deviation of the unit from a preselected heading.

3. The mobile transport unit of claim 1 and further including:

at least one ultrasonic sensing means affixed to the vehicle chassis about a front end thereof and electronically coupled to the control means, said ultrasonic sensors being adapted for detecting an obstacle in the path of the unit.

4. The mobile transport unit of claim 1 wherein;

said robotic manipulator comprises a six axis robotic arm, and an arm control means electronically coupled thereto.

5. The mobile transport unit of claim 1 wherein;

the diffuse infrared communications means comprises a transmitter/reciver for communicating with a transmitter/receiver within an environment in which the unit is to operate, each transmitter/receiver being capable of transmitting and receiving infrared signals utilizing a frequency shift keying encoding format.

6. The mobile transport unit of claim 1 wherein,

the laser docking and positioning means comprises a vehicle mounted laser light source, a rotating mirror assembly for directing a light beam therefrom about an arc in front of the mobile transport unit, an encoder means for sensing angular rotation of the mirror assembly, a detector means fqr detecting a reflected light beam, a microprocessor means coupled to said encoder means and said detector means for correlating angular position of the mirror assembly with said reflected light beam and for computing a position and heading therefrom;

and

a corner reflector means for mounting to said fixed piece of equipment.

7. A mobile transport unit comprising:

a rectangular shaped chassis, adapted for mounting a robotic manipulator arm;

a first and a second rear wheel mounted to the chassis at opposing rear lateral ends thereof to be vertically pivotable such that said wheels may deviate from a vehicle center line;

a front steering assembly being pivotably mounted about a vertical axis whereby said assembly may be rotated relative to said vehicle center line, the assembly including a pair of horizontally mounted front wheels, said front wheels being coupled to a drive motor for supplying rotary motion thereto, the assembly further including a steering motor for rotating the assembly about said vertical axis whereby a heading of the assembly may be changed, the assembly further including a rotary encoder means coupled thereto for measuring angular deviations of the assembly from a fixed reference point on the unit, the assembly further including a gyroscope means coupled thereto for measuring a deviation from a predetermined heading and a distance measuring means for measuring rotational motion of said front wheels about said horizontal axis whereby a distance travelled by the unit from a predetermined starting point may be measured;

at least one computer means mounted within the chassis and electrically coupled to said rotary encoder means, said distance measuring means, said drive and said steering motors, for directing the operation of said drive and said steering motors;

a diffuse optical communication system mounted to said chassis, electrically coupled to the computer means and in communication with an extra-vehicular information and control means for directing and controlling the mobile transport unit;

a docking module mounted to said chassis about a front portion thereof and including a laser light source means and a rotary reflecting means for directing a beam of light from said laser light source means, said rotary reflecting means having a central axis of rotation colinear with said axis of rotation of said steering assembly, said rotatable reflecting means adapted for directing said beam perpendicularly to said vertical axis and about an arc in front of the mobile transport unit, said beam being adapted for reflecting from a fixed reflector attached to a fixed point, said docking module including sensing means for sensing said reflective light whereby a triangulation may be obtained and a position of the mobile transport unit relative to said fixed point may be calculated;

a collision avoidance means affixed to said chassis about a front end thereof and comprising at least one ultrasonic transducer and receiver for sending and receiving high frequency sound waves, whereby an object appearing a predetermined distance in front of the transport unit may be detected, the collision avoidance means being electrically coupled to the computer means;

an internal power supply means comprising a plurality of batteries mounted to said chassis and coupled to said drive and steering motors, said computer means, and said robotic arm for supplying electrical power thereto;

a cargo bay for receiving and transporting a plurality of wafer cassettes, said cargo bay comprising a vertical arrangement of a plurality of shelves wherein said wafer cassetes may be stored and from which said wafer cassettes may be retrieved by said robotic arm; and

a plurality of protective skins affixed to the chassis to enclose the internal components thereof whereby the possibilities of contamination are reduced and air flow characteristics are improved to prevent turbulence around said wafer cargo bay and said robotic arm.

8. The mobile transport unit of claim 7 wherein,

the diffuse optical communications system comprises an infrared transmitter/receiver and associated circuitry for encoding and decoding information utilizing a frequency shift-keying technique, and the extra-vehicular information and control means comprises at least one fixed infrared transmitter/receiver and an associated central control unit for the control thereof.