Power supply system for a quadrupole mass spectrometer

• US 4,703,190 A
• Filed: 06/24/1986
• Issued: 10/27/1987
• Est. Priority Date: 06/25/1985
• Status: Expired due to Fees

• Current Assignee: Anelva Corporation (Canon Inc.)
• Original Assignee: Anelva Corporation (Canon Inc.)
• Inventors: Tamura, Yoshikazu, Kitajima, Katsuo
• Primary Examiner(s): Shoop, Jr., William M.
• Assistant Examiner(s): Ip, Shik Luen Paul
• Application Number:
  US06/877,923
• Time in Patent Office: 490 Days
• Field of Search: 307/1, 307/2, 307/3, 307/4, 307/5, 307/6, 307/7, 307/73, 307/75, 307/87, 324/316, 324/317, 324/318, 324/320, 324/321, 324/322, 328/155, 356/326, 356/327, 356/328, 356/302, 356/319, 356/343, 356/308, 250/292, 250/251, 250/300, 250/281, 250/343, 331/183, 331/112, 331/106, 331/108 C, 331/109, 331/101 T, 331/110, 331/182, 331/184, 331/185, 331/186
• US Class Current: 307/2
• CPC Class Codes: H01J 49/022 Circuit arrangements, e.g. for generating deviation currents or voltages regulating electric or magnetic variables in general, e.g. current, magnetic field G05F; Components associated with high voltage supply high voltage supply per se H02M
• CPC Class Codes: H01J 49/4215 Quadrupole mass filters H01J49/4225 takes precedence

Abstract

A power supply system for a quadrupole mass spectrometer includes an RF (radio frequency) power source for generating RF voltages and a voltage divider functioning as a DC (direct current) voltage generating circuit. This voltage divider divides the RF voltages and then rectifies them so as to derive DC voltages while maintaining a proportional relationship to the RF voltages. Thereafter, the DC voltages are superimposed on the RF voltages. The resultant voltages are applied to the electrodes of the quadrupole mass spectrometer.

Claims

1. A power supply system for a quadrupole mass spectrometer comprising:

means for generating RF (radio frequency) voltages;

means for dividing the RF voltages to produce subdivided RF voltages;

means for detecting the RF voltages to produce a detected voltage;

means for generating DC (direct current) voltages from the subdivided RF voltages obtained by said RF voltage dividing means, the subdivided RF voltages being rectified by the DC voltage generating means under control of the detected voltage while a proportional relationship is being maintained between the detected voltage and the resultant DC voltages; and

means for superimposing the resultant DC voltages over the RF voltages, the superimposed voltages being applied to the quadrupole mass spectrometer.

2. A power supply system as claimed in claim 1, further comprising:

means for generating a reference voltage signal, the amplitude of the reference voltage signal corresponding to that of the detected voltage, whereby the reference voltage signal is supplied to the DC voltage generating means.

3. A power supply system as claimed in claim 1, wherein the RF voltage dividing means comprises a series-connected circuit of first and second capacitors, the subdivided RF voltages being produced at a junction of the series-connected circuit.

4. A power supply system as claimed in claim 1, wherein the DC voltage generating means comprises:

a rectifying diode electrically connected to the RF voltage dividing means for receiving the subdivided RF voltages so as to produce the DC voltages; and

an operational amplifier electrically connected to the diode and the RF voltage detecting means for receiving the DC voltages and the detected voltage.

5. A power supply system as claimed in claim 2, wherein the DC voltage generating means comprises:

a rectifying diode electrically connected to the RF voltage dividing means for receiving the subdivided RF voltages so as to produce the DC voltages; and

an operational amplifier electrically connected to the diode and the reference voltage signal generating means for receiving the DC voltages and the reference voltage signal.

6. A power supply system as claimed in claim 1, wherein the RF voltage dividing means comprises coil windings of secondary winding of an RF transformer, the primary winding of the RF transformer being connected to the RF voltage generating means.