Alignment apparatus

• US 4,713,784 A
• Filed: 06/21/1984
• Issued: 12/15/1987
• Est. Priority Date: 07/04/1983
• Status: Expired due to Term

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Ayata, Naoki
• Primary Examiner(s): Harkcom, Gary V.
• Assistant Examiner(s): HERNDON, HEATHER R
• Application Number:
  US06/623,088
• Time in Patent Office: 1,272 Days
• Field of Search: 364/559, 364/488-491, 340/347 SH, 356/138, 356/400, 356/153, 250/237 R, 250/561
• US Class Current: 356/401
• CPC Class Codes: G03F 9/7069 Alignment mark illumination, e.g. darkfield, dual focus

Abstract

An alignment apparatus includes an illumination source for illuminating an object having a mark, a photoreceptor for receiving light reflected by the object, a converter for digitizing the output signal level of the photoreceptor, a circuit for determining a slice level on the basis of the data digitized by said converter, a device for comparing the digitized data and the slice level to extract a signal relating to the mark and determining the interval between the mark and a reference, and a device for causing relative movement between the object having the mark and the object having the reference mark to place them into alignment with each other.

Claims

1. An apparatus for aligning two objects in a predetermined relationship using alignment marks, comprising:

means for producing a beam used to illuminate the alignment marks;

means for detecting an area on which the beam impinges;

means for effecting scanning by relative movement between the beam and the alignment marks;

means for sequentially converting analog data produced by said detecting means in accordance with the scanning to digital data at predetermined intervals, while the scanning is being effected; and

means for processing the digital data from said converting means to align the two objects, wherein said processing means includes a first memory for storing data corresponding to a peak of the analog data among the digital data of said converting means upon completion of the scanning deflection.

2. An apparatus according to claim 1, wherein said processing means includes a memory for storing digital data and a comparator for comparing the digital data from said converting means with corresponding digital data stored in said memory.

3. An apparatus according to claim 2, wherein said comparator is effective to store data having a larger value as a result of the comparison.

4. An apparatus according to claim 3, wherein said memory stores, upon completion of the scanning deflection, the digital data of said converting means which corresponds to a peak of the analog data.

5. An apparatus according to claim 4, wherein said processing means determines, on the basis of the digital data in said memory upon completion of the first scanning deflection, a level for extracting from the digital data from said converting means the data corresponding to said alignment marks.

6. An apparatus according to claim 2, wherein said processing means adds plural digital data of the digital data from said converting means which are in a predetermined relation, and said processing means comprises a second memory for sequentially applying said added plural digital data to said comparator.

7. An apparatus according to claim 1, wherein said processing means includes a memory for storing in different addresses the digital data from said converter means.

8. An apparatus according to claim 1, wherein said processing means determines the position of the alignment marks on the basis of the digital data corresponding to the peak of the analog data in said memory after completion of plural scanning deflections.

9. An apparatus according to claim 1, wherein said processing means includes a second memory and determines a level for extracting data corresponding to the alignment marks from the digital data in said second memory on the basis of the digital data in said first memory.