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Broadband antireflective coating composition and method

  • US 4,830,879 A
  • Filed: 09/25/1986
  • Issued: 05/16/1989
  • Est. Priority Date: 09/25/1986
  • Status: Expired due to Fees
First Claim
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1. A process for producing broadband antireflective coatings comprising:

  • a. preparing a plurality of solutions of an alkoxide precursor material by reacting an alkoxide or alkoxide mixture with water with or without a catalyst at conditions adapted to produce a series of solutions containing particles of a different size in each solution so that the series of solutions has one solution of a smallest size and one or more solutions each having increasing sizes, wherein the alkoxide is represented by the general formula M(OR)x where M is a metal atom, R is an alkyl group, having from one to five carbon atoms, and x is the valency of the metal atom, and whereby the plurality of solutions are aged or have increased solution pH so as to obtain solutions having different particle size ranges and the alkoxide or alkoxide mixture is selected from the group consisting of the alkoxides of silicon, aluminum, titanium, tantalum, niobium, or zirconium;

    b. providing a substrate and depositing and drying one or more layers of a first coating over the substrate from the solution having the smallest particle size;

    c. depositing and drying one or more additional coatings each having one or more layers over the coating obtained in step B. from solutions having increasing particle sizes; and

    d. thermally treating the plurality of deposited coatings from the above steps to obtain a consolidated antireflective coating with a porous structure, wherein the thermal treatment is below the temperature at which the porous structure of the coating will collapse.

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