Methods of making silicon-based sensors

• US 4,870,745 A
• Filed: 12/23/1987
• Issued: 10/03/1989
• Est. Priority Date: 12/23/1987
• Status: Expired due to Term

• Current Assignee: Siemens-Bendix Automotive Electronics LP
• Original Assignee: Siemens-Bendix Automotive Electronics LP
• Inventors: Lee, Ki W.
• Primary Examiner(s): WOODIEL, DONALD
• Application Number:
  US07/137,219
• Time in Patent Office: 650 Days
• Field of Search: 156/662, 29/610.1, 29/621.1, 29/621, 29/620, 29/612, 29/832
• US Class Current: 29/610.1
• CPC Class Codes: G01F 1/6845 Micromachined devices
• CPC Class Codes: Y10T 29/49082 Resistor making
• CPC Class Codes: Y10T 29/4913 Assembling to base an electrical component, e.g., capacitor, etc.

Abstract

A silicon-based sensor includes a substrate, a sensor element, and a protective diaphragm mounting and covering the sensor element. The diaphragm is a silicon layer which, in a preferred embodiment, includes an etch-stop dopant. The etch-stop layer is sealed to the substrate so that the layer covers and mounts the sensor element to the substrate. The sensor is fabricated by forming a trough area in a surface of a silicon block (e.g., a silicon chip or wafer), treating the trough area with an etch-stop dopant (e.g., boron), depositing a sensor element onto the doped trough area, sealing at least the periphery of the doped trough area to a surface of a substrate (e.g., glass) so as to encapsulate the sensor element, and then etching away undoped regions of the silicon block so that the doped trough area remains as a protective diaphragm sealed to the substrate and covering the sensor element. It is also possible to form a bonding pad on untreated (e.g., undoped) discontinuous regions of an otherwise etch-stop treated trough layer so that when etched, the bonding pad is exposed to permit interconnection with electronic circuitry, yet the etch-stop treated layer remains so as to mount the bonding pad to the substrate.

Claims

1. A method of fabricating a sensor comprising the steps of:

(a) forming a trough area in a surface of a silicon block;

(b) forming an etch-stop layer in the trough area;

(c) depositing a sensor element onto said trough area;

(d) sealing at least the periphery of said trough area to a surface of a substrate to thereby encapsulate said sensor element; and

(e) selectively etching away regions of said silicon block so that said etch-stop layer remains as a protective diaphragm sealed to said substrate and covering said sensor element.

2. A method as in claim 1, wherein step (d) is practiced by electrostatically sealing at least the periphery of said trough area to a glass substrate.

3. A method as in claim 1, wherein step (a) is practiced so as to form another trough area in said silicon block, and step (b) is practiced by discontinuously etch-stop treating said another trough area so as to define an untreated region therein;

and wherein said method further includes forming a bonding pad over said untreated region in said another trough area so that when step (e) is practiced, said bonding pad will be exposed through said discontinuous doped layer of said another trough area by virtue of said untreated region thereof being etched away.

4. A method as in claim 1 wherein step (b) is practiced using an etch-stop dopant.

5. A method of fabricating a sensor comprising the steps of:

(a) forming a trough area in a surface of a silicon substrate;

(b) discontinuously doping the trough area with an etch-stop dopant to form a doped layer thereon having at least one undoped region;

(c) depositing a metallic layer over said at least one undoped region;

(d) etching away undoped silicon of said substrate, including said at least one undoped region so that said doped layer of said trough area remains and so that said metallic layer is exposed.

6. A method as in claim 5, further comprising the step of sealing at least a periphery of said doped trough area layer to a surface of a second substrate.

7. A method as in claim 5, wherein said second substrate is glass.

8. A method of making a sensor of the type having a sensor element and a metallic bonding pad adapted to permit interconnection between said sensor element and electronic circuitry, said method comprising the steps of:

(a) forming respective trough areas in a silicon substrate for said sensor element and said bonding pad;

(b) doping said respective trough areas with an etch-stop dopant so that at least that one of said trough areas includes at least one undoped region;

(c) forming said bonding pad and said sensor element in said one and the other said trough areas, respectively; and

(d) etching away undoped regions of said silicon substrate, including said at least one undoped region of said one trough area, so that said doped trough areas remain and so that said bonding pad is exposed.

9. A method as in claim 8, further comprising the step of sealing at least a periphery of said doped trough area layer to a surface of a second substrate.