Light filters for microelectronics

• US 4,876,165 A
• Filed: 01/12/1987
• Issued: 10/24/1989
• Est. Priority Date: 09/30/1982
• Status: Expired due to Term

• Current Assignee: Brewer Science Inc.
• Original Assignee: Brewer Science Inc.
• Inventors: Lamb, James E., Stichnote, Lynn K., Brewer, Terry L., Hawley, Dan W., Latham, William J.
• Primary Examiner(s): Dees, Jose G.
• Application Number:
  US07/002,107
• Time in Patent Office: 1,016 Days
• Field of Search: 430/7, 430/321, 430/283, 430/20, 430/4, 430/330, 350/311, 350/330
• US Class Current: 430/7
• CPC Class Codes: C08G 73/06 Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
• CPC Class Codes: G02F 1/133512 Light shielding layers, e.g. black matrix G02F1/136209 takes precedence
• CPC Class Codes: G03F 1/56 Organic absorbers, e.g. of photo-resists
• CPC Class Codes: G03F 7/091 characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
• CPC Class Codes: G03F 9/7026 Focusing
• CPC Class Codes: H01L 21/0276 using an anti-reflective coating anti-reflective coating for lithography in general G03F7/09

Abstract

Filters suitable for microelectronic uses and the like may be prepared directly on substrates either as monolithically integrated filters or as hybrid filters using a soluble dye material in a resin. The resin may be applied to microelectronic substrates and patterned by conventional microphotolithographic processes.

Claims

1. In a process of making microelectronic color filter elements by microphotolithography, the improvement comprising, applying a layer of a substantially non-particulate filter coating material to a filter substrate, the filter coating material including a vehicle and a soluble dye incorporation therein, the soluble dye being heat stable and in combination with the vehicle being effective to produce a high color resolution, applying a photoresist to the layer of the filter coating material on the filter substrate, photographically imaging and developing the photoresist, the filter coating material imaging and developing with the photoresist, curing the color element to substantially insolubilize the color element, the cured filter element containing the stable dye being effective to consistently transmit and resolve colored light, the cured filter element containing the stable dye having a high electrical resistivity and a high dielectric strength.

2. The method of claim 1 wherein the substrate is coated with a substantially planar array of filter elements, the filter elements being of a plurality of colors.

3. The method of claim 1 wherein the vehicle is selected from the group consisting of readily soluble polyamic acid precursors of polyimide resins, polymers and copolymers of polyimide resins, and combinations thereof with water soluble resins.

4. The method of claim 1 wherein the vehicle is selected from the group consisting of polyamic acid precursors of polyimide resins.

5. The method of claim 4 wherein the vehicle is selected from the group consisting of ODA and PMDA or ODA, PMDA and BTDA, the vehicle components being present in approximate stoichiometric amounts.

6. The method of claim 4 wherein the vehicle includes PMMA, 4-APS, 3-APS or BAPS.

7. The process of claim 1 including orienting the filter coating material in the color filter element to provide alignment for liquid crystal material.

8. The method of claim 7 including applying a liquid crystal material to the oriented filter coating material.

9. In a process of making microelectronic color filter elements by microphotolithography, the improvement comprising, applying a first layer of a substantially non-particulate filter coating material to a filter substrate, the filter coating material including a vehicle and a first soluble dye incorporated therein, the soluble dye being heat stable and in combination with the vehicle being effective to produce a high color resolution, applying a first photoresist to the layer of filter coating material on the filter substrate and imaging and developing the photoresist, the filter coating material imaging and developing with the photoresist and developing discrete first color elements on the substrate, curing the first color elements to substantially insolubilize the first color elements, applying a second layer of a substantially non-particulate filter coating material to the coating substrate, the second layer of filter coating material including a vehicle and a second soluble dye incorporated therein, the second soluble dye being heat stable and in combination with the vehicle being effective to produce a high color resolution, applying a second photoresist to the layer of filter coating material on the filter substrate and imaging and developing the photoresist, the filter coating material imaging and developing with the photoresist and developing discrete second color elements on the substrate, curing the second color elements to substantially insolubilize the second color elements, the second color elements forming a substantially planar array with the first color elements, the cured filter elements containing the stable dye being effective to consistently transmit and resolve colored light, the cured filter coating material having a high electrical resistivity and a high dielectric strength.

10. The process of claim 9 including orienting the filter coating material in the color filter elements to provide alignment for liquid crystal material.

11. The process of claim 10 including applying a liquid crystal material to the oriented filter coating material.

12. In a process of making microelectronic color filter elements by microphotolithography, the improvement comprising, applying a first layer of a substantially non-particulate filter coating material to a filter substrate, the filter coating material including a vehicle selected from the group consisting of readily soluble polyamic acid precursors of polyimide resins, polymers and copolymers of polyimide resins, and combinations thereof with water soluble resins, the vehicle having a first soluble dye incorporated therein, the soluble dye being heat stable and in combination with the vehicle being effective to produce a high color resolution, applying a first photoresist to the layer of filter coating material on the filter substrate and imaging and developing the photoresist, the filter coating material imaging and developing with the photoresist and developing discrete first color elements on the substrate, curing the first color elements to substantially insolubilize the first color elements, applying a second layer of a substantially non-particulate filter coating material to the filter substrate, the filter coating material including a vehicle selected from the group consisting of readily soluble polyamic acid precursors of polyimide resins, polymers and copolymers of polyimide resins, and combinations thereof with water soluble resins, the vehicle having a second soluble dye incorporated therein, the second soluble dye being heat stable and in combination with the vehicle being effective to produce a high color resolution, applying a second photoresist to the layer of filter coating material on the filter substrate and imaging and developing the photoresist, the filter coating material imaging and developing with the photoresist and developing discrete second color elements on the substrate, curing the second color elements to substantially insolubilize the second color elements, the second color elements being immediately adjacent to the first color elements and forming a substantially planar array with the first color elements, the array of cured filter elements containing the stable dye being effective to consistently transmit and resolve colored light, the cured filter material having a high electrical resistivity and a high dielectric strength.

13. The process of claim 12 including orienting the filter coating material in the filter coating elements to provide alignment for liquid crystal material.

14. The process of claim 13 including applying a liquid crystal material to the oriented filter coating material.

15. In a process of making microelectronic color filter elements by microphotolithography, the improvement comprising, applying a first layer of a substantially non-particulate filter coating material to a filter substrate, the filter coating material including a vehicle selected from the group consisting of polymers and copolymers of ODA and PMDA or ODA, PMDA and BTDA, the vehicle components being present in approximate stoichiometric amounts, and combinations thereof with water soluble resins, the vehicle having a first soluble dye incorporated therein, the soluble dye being heat stable above about 200°

C., and in combination with the vehicle, the dye being effective to produce a high color resolution, applying a photoresist to the layer of filter coating material on the filter substrate, photographically imaging and developing the photoresist, the filter coating material imaging and developing with the photoresist to form discrete first color elements on the substrate, curing the first color elements to substantially insolubilize the first color elements, applying a second layer of a substantially non-particulate filter coating material to the filter substrate, the filter coating material including a vehicle selected from the group consisting of polymers and copolymers of ODA and PMDA or ODA, PMDA and BTDA, the vehicle components being present in approximate stoichiometric amounts, and combinations thereof with water soluble resins, the vehicle having a second soluble dye incorporated therein, the second soluble dye being heat stable above about 200°

C., and in combination with the vehicle, the dye being effective to produce a high color resolution, applying a photoresist to the layer of filter coating material on the filter substrate, photographically imaging and developing the photoresist, the filter coating material imaging and developing with the photoresist to form discrete second color elements on the substrate, curing the second color elements to substantially insolubilize the second color elements, the second color elements being immediately adjacent to the first color elements and forming a substantially planar array with the first color elements, the array of cured filter elements containing the stable dye being effective to consistently transmit and resolve colored light, at least one set of the color elements having a vehicle containing a modifying polymer selected from the group consisting of 4-APS, 3-APS or BAPS, the cured filter material having an electrical resistivity of above about 3×

10¹⁵ ohm-cm and a dielectric strength of above about 7×

10⁵ volts/cm, abrading the array of cured filter elements to orient the filter coating material and provide alignment for liquid crystal material and applying a liquid crystal material to the oriented filter coating material.