Sealing glass composition with filler containing Fe and W partially substituted for Ti in PbTiO.sub.3 filler
First Claim
1. In a sealing glass composition, as used for sealing members in electronic parts, consisting of a mixture which comprises solder glass powder of a low melting temperature and low expansion coefficient filler powder, the improvement wherein said filler powder comprises a ceramic powder which consists, by weight, of PbO 65-75 %, TiO2 10-25%, Fe2 O3 1-10%, WO3 1-12%, and CaO 0-5%.
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Abstract
A sealing glass composition suitable for sealing members in semiconductor devices at a temperature below about 450° C. and a comparatively low thermal expansion coefficient of about 35-50×10-7 /°C. matching that of semiconductors. The sealing glass composition comprises 50-80 vol % solder glass powder and 20-50 vol % filler powder of a ceramic comprising, by weight, PbO 65-75%, TiO2 10-25%, Fe2 O3 1-10%, WO3 1-12%, and CaO 0-5%, so that Ti in the PbTiO3 filler is partially substituted by Fe and W. The filler powder has an average particle size of about 5 μm. In use of the sealing glass composition, microcracks are absent in glass phase around the filler after sealing.
15 Citations
4 Claims
- 1. In a sealing glass composition, as used for sealing members in electronic parts, consisting of a mixture which comprises solder glass powder of a low melting temperature and low expansion coefficient filler powder, the improvement wherein said filler powder comprises a ceramic powder which consists, by weight, of PbO 65-75 %, TiO2 10-25%, Fe2 O3 1-10%, WO3 1-12%, and CaO 0-5%.
Specification