Bar-shaped magnetron or sputter cathode arrangement

• US 4,904,362 A
• Filed: 07/19/1988
• Issued: 02/27/1990
• Est. Priority Date: 07/24/1987
• Status: Expired due to Fees

• Current Assignee: MIBA Gleitlager AG Dr Mitterbauer
• Original Assignee: Miba Gleitlager Aktiengesellschaft (Peter Mitterbauer)
• Inventors: Bangert, Herwig, Wagendristel, Alfred, Gaertner, Walter, Koroschetz, Franz
• Primary Examiner(s): Weisstuch, Aaron
• Application Number:
  US07/221,383
• Time in Patent Office: 588 Days
• Field of Search: 204/192.12, 204/192.15, 204/192.16, 204/298 CS, 204/298 TS, 204/298 CM, 204/298 CX, 204/298 SC, 204/298 MO
• US Class Current: 204/192.12
• CPC Class Codes: C23C 14/16 on metallic substrates or on substrates of boron or silicon
• CPC Class Codes: C23C 14/3414 Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
• CPC Class Codes: F16C 2204/20 Alloys based on aluminium
• CPC Class Codes: F16C 2204/24 with lead as the next major constituent
• CPC Class Codes: F16C 33/06 Sliding surface mainly made of metal F16C33/24 - F16C33/28 take precedence; casting metal bearing surfaces B22D15/02, B22D19/08
• CPC Class Codes: F16C 33/12 Structural composition; Use of special materials or surface treatments, e.g. for rust-proofing
• CPC Class Codes: H01J 37/3405 Magnetron sputtering

Abstract

The invention relates to a bar-shaped magnetron-sputter cathode arrangement having an internal, cooled permanent magnet system and a carrier tube for the target. It is provided according to the invention that at least one thermal contact layer (38) is disposed between the carrier tube (36) and the target, which consists of one or more ring(s) (37, 37'"'"', 37") shrunk, especially interchangeably, onto the carrier tube (36). During sputtering the cathode (6) and the surface to be sputtered can be subjected to a mutual relative motion in the longitudinal direction of the cathode (6), for which purpose an adjusting element is provided. The magnets (31) are disposed inside the carrier tube (36) with the magnetic fields having alternately opposing directions in the longitudinal direction of the carrier tube (36). They possess cylindrical or polygonal lateral surfaces and end faces (44) which are parallel and slope at an angle (α) to the longitudinal direction of the electrode (6) or shaft (30).

Claims

1. Bar-shaped magnetron-sputter cathode arrangement having an internal, cooled permanent magnet system and a carrier tube for a target which is deposited on the bar-shaped carrier tube, which comprises a non-magnetic steel, and which comprises appropriate different target materials, wherein at least one thermal contact layer is disposed between the carrier tube and the target, and the target comprises one or more rings shrunk onto the carrier tube, the thermal contact layer comprising a solid, highly thermally conductive metal or alloy.

2. Arrangement as claimed in claim 1, wherein the thermal contact layer disposed between the rings and the carrier tube has a thickness in the range from about 5 μ

m to about 50 μ

m and has a low melting point and is soft and formable, the metal or alloy having a hardness of <

20 MHV.

3. Arrangement as claimed in claim 2, wherein the melting point of the metal or alloy of the thermal conducting layer lies at temperatures below the softening point or melting point of the deposited target material.

4. Arrangement as claimed in claim 2, wherein the metal or alloy of the thermal contact layer has a coefficient of thermal expansion which exceeds that of the target material.

5. Arrangement as claimed in claim 1, wherein the rings are mounted while warm onto the carrier tube and are located with a force fit on the thermal contact layer.

6. Arrangement as claimed in claim 1, wherein the rings can have different widths and are shrunk onto the carrier tube sequentially in the axial direction in a predetermined sequence.

7. Arrangement as claimed in claim 1, in which permanent magnets are disposed in the interior of the carrier tube around its longitudinal axis, the magnets being continuously rotatable and surrounded by a flowing cooling medium, the magnets being disposed inside the carrier tube such that their magnetic fields are provided in alternately opposing directions in the longitudinal direction of the carrier tube.

8. Arrangement as claimed in claim 7, wherein the magnets have cylindrical or polygonal lateral surfaces and end faces which are parallel and slope at an angle with respect to the longitudinal direction of the cathode, and wherein facing end faces of sequential magnets have opposing magnetic poles.

9. Arrangement as claimed in claim 7, wherein the magnets have a tubular cutout in the longitudinal direction of the carrier tube by which they are pushed onto a shaft, the shaft being hollow to provide a coolant throughflow connected to a coolant supply device, and the magnets are disposed in the carrier tube so as to form a gap between the carrier tube and the magnets, the gap being surrounded by an enveloping tube constructed as a coolant return line.

10. Arrangement as claimed in claim 1, wherein the thermal contact layer has a thickness in the range from about 10 μ

m to about 20 μ

m.

11. Arrangement as claimed in claim 1, wherein the metal or alloy comprises In, Ga, Pb, Sn, or Wood'"'"'s metal.

12. Sputtering process for sputtering with a magnetron or other type sputter cathode arrangement, such process being suitable for sputtering surfaces having curved areas such as the inner surfaces of hollow bodies, such process comprising the steps of:

relatively moving the surfaces to be sputtered and a sputtering cathode arrangement that includes a carrier tube on which different target materials are deposited, the carrier tube having a plurality of rings of different target materials shrunk thereon sequentially in the axial direction of the carrier tube, the cathode arrangement being held fixed and the surface or the body carrying the surface being moved, the cathode arrangement and the surfaces to be sputtered being subjected to a mutual relative motion in the longitudinal direction of the carrier tube of the cathode arrangement.

13. Process as claimed in claim 12, wherein the relative motion between the cathode arrangement and the surface to be sputtered is an oscillating motion, the throw of which is chosen to be larger than the width of the widest ring of target material.

14. Process as claimed in claim 12, wherein the relative motion is a traversing motion and includes an advancing motion of the body carrying the surface to be sputtered in relation to the longitudinal direction of the cathode arrangement on which is superimposed an oscillating motion.

15. Tubular target, adapted for use with a bar-shaped magnetron or sputter cathode arrangements having a carrier tube for the target material, wherein between the carrier tube of the tubular target and the target material there is provided at least one thermal contact layer which has a thickness of about 5 μ

m to about 50 μ

m and which comprises a solid highly thermally conductive metal having a low melting point and a hardness of <

20 MHV, at least one ring comprising an appropriate target material being mounted on the carrier tube in the axial direction, the ring being shrunk onto the carrier tube while warm and disposed with a force fit on the thermal contact layer, the metal of the thermal contact layer having a coefficient of thermal expansion which exceeds that of the target material.

16. Target as claimed in claim 15, wherein the thermal contact layer has a thickness in the range from about 10 μ

m to about 20 μ

m.

17. Target as claimed in claim 16, comprising a number of sequential rings including different target materials and having different widths.

18. Apparatus for carrying out a sputtering process with a sputter cathode arrangement:

the sputter cathode arrangement comprising a carrier tube on which different target materials are deposited, the carrier tube having a plurality of rings of different target materials shrunk thereon sequentially and in the axial direction of the carrier tube and a thermal contact layer provided between the carrier rod and the rings, the contact layer comprising a solid, highly thermal conductive metal or alloy; and

for carrying either the cathode arrangement or the surface to be sputtered, said means being formed by a carrier device which executes a reciprocating motion in the longitudinal direction of the carrier tube and which can be actuated by a driving device whereby the surface to be sputtered and the sputter cathode arrangement are relatively moved along the longitudinal direction of the carrier tube.