Process for doping crystals of wide band gap semiconductors

• US 4,904,618 A
• Filed: 08/22/1988
• Issued: 02/27/1990
• Est. Priority Date: 08/22/1988
• Status: Expired due to Term

• Current Assignee: Gertrude F. Neumark
• Original Assignee: Gertrude F. Neumark
• Inventors: Neumark, Gertrude F.
• Primary Examiner(s): Hearn, Brian E.
• Assistant Examiner(s): NGUYEN, TUAN H
• Application Number:
  US07/234,802
• Time in Patent Office: 554 Days
• Field of Search: 437/150, 437/82, 437/905, 437/81, 437/144, 437/965, 437/945, 437/126, 437/127, 437/130, 437/971, 148/DIG. 64, 148/DIG. 99, 148/DIG. 101, 148/DIG. 41, 357/308, 357/17
• US Class Current: 438/502
• CPC Class Codes: H01L 21/02411 Tellurides
• CPC Class Codes: H01L 21/02562 Tellurides
• CPC Class Codes: H01L 21/02576 N-type
• CPC Class Codes: H01L 21/02579 P-type
• CPC Class Codes: H01L 21/02625 using melted materials
• CPC Class Codes: H01L 21/02628 using solutions
• CPC Class Codes: H01L 21/38 Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions
• CPC Class Codes: H01L 33/0083 for devices with an active region comprising only II-VI compounds
• CPC Class Codes: H01L 33/285 characterised by the doping materials
• CPC Class Codes: Y10S 148/041 Doping control in crystal growth
• CPC Class Codes: Y10S 148/064 Gp II-VI compounds

Abstract

Non-equilibrium impurity incorporation is used to dope hard-to-dope crystals of wide band gap semiconductors, such as zinc selenide and zinc telluride. This involves incorporating into the crystal a compensating pair of primary and secondary dopants, thereby to increase the solubility of either dopant alone in the crystals. Thereafter, the secondary more mobile dopant is removed preferentially, leaving the primary dopant predominant. This technique is used to dope zinc selenide p-type by the use of nitrogen as the primary dopant and lithium as the secondary dopant.

Claims

1. A process for the non-equilibrium incorporation of a dopant into a crystal of a wide band gap semiconductor comprising the steps of treating the crystal in the presence of first and second compensating dopants of different mobilities for introducing substantially equal amounts of the two dopants into at least a portion of the crystal such that the concentration of the less mobile of the two dopants in said portion of the crystal is in excess of the solubility therein of the less mobile dopant in the absence of the more mobile of the two dopants, and then heating the crystal to remove therefrom preferentially the more mobile of the two dopants whereby there is left a non-equilibrium concentration of the less mobile dopant in said portion of the crystal.

2. The process of claim 1 in which the semiconductor is zinc selenide and the more mobile dopant is lithium and the less mobile dopant is nitrogen.

3. The process of claim 1 in which the semiconductor is zinc telluride and the more mobile dopant is lithium and the less mobile dopant is chlorine.

4. The process of claim 1 in which the more mobile dopant can move via interstitial sites and the less mobile dopant is at a substantial site in the crystal.

5. The process of forming a p-n junction diode in a crystal of a wide band gap semiconductor comprising the steps of

preparing a crystal of the semiconductor of one conductivity type and growing on a surface of the crystal an epitaxial layer that includes a compensating pair of primary and secondary dopants in substantially equal amounts, such that the concentration of the primary dopant in the layer is in excess of the solubility of the primary dopant in the layer in the absence of the secondary dopant, where the primary dopant is characteristic of the conductivity type opposite that of said crystal and is less mobile than the secondary dopant, and

removing selectively the secondary dopant from the layer to leave it of the opposite conductivity type, where the dopant remaining in the layer is predominantly the primary dopant in a non-equilibrium concentration.