Thin film delay lines having a serpentine delay path

• US 4,942,373 A
• Filed: 04/11/1988
• Issued: 07/17/1990
• Est. Priority Date: 07/20/1987
• Status: Expired due to Term

• Current Assignee: Thin Film Technology Corp.
• Original Assignee: Thin Film Technology Corp.
• Inventors: Ozawa, Paul, Nakanata, Fumitoshi, Brooks, Mark
• Primary Examiner(s): Laroche, Eugene R.
• Assistant Examiner(s): Lee, Benny
• Application Number:
  US07/180,353
• Time in Patent Office: 827 Days
• Field of Search: 333/161, 333/164, 333/156, 333/140, 333/23, 336/200, 336/232
• US Class Current: 333/161
• CPC Class Codes: H01P 9/006 Meander lines

Abstract

Multi-layered, thick/thin film, nanosecond delay lines, the inductive/capacitive characteristics of which are tailored to provide line impedances yielding unit delays of 1 to 10 nanoseconds. The delay lines are constructed on a supporting ceramic, resin/fiber or plastic substrate. In alternative embodiments, a serpentine conductive layer of tailored line widths and conductor spacings is sandwiched relative to overlying dielectric layers of 25 to 200 microns thickness and associated ground plane layers. In another embodiment, multiple conductor layers are sandwiched relative to intervening dielectric and ground plane layers. Lateral contact pads/pins, vertical vias and jumper conductors permit circuit connection and interconnection of the layers.

Claims

1. Thin film delay line apparatus comprising:

(a) an insulative support substrate;

(b) a conductive signal layer deposited over said substrate to provide a patterned serpentine conductor of a predetermined length and weaving back and forth upon itself and terminating in at least first and second contact pads;

(c) a first dielectric layer printed over said signal layer except in the area of said first and second contact pads;

(d) a conductive ground layer deposited over said first dielectric layer except in the area of said first and second contact pads and having third and fourth contact pads thereto;

(e) means for making electrical contact to said first, second, third and fourth contact pads;

(f) means for encapsulating said delay line apparatus; and

(g) wherein the inductive and capacitive characteristics of said signal and ground layers and said first dielectric layer relative to one another and between adjacent portions of the serpentine signal layer are such that a signal applied to said first contact pad takes a known time in the range of 1 to 10 nanoseconds to reach said second contact pad.

2. Thin film delay line apparatus comprising:

(a) an insulative support substrate;

(b) a single layer including,

(i) a conductive adhesion layer sputtered over at least one surface of said substrate,

(ii) a conductive second layer sputtered over said adhesion layer, and

(iii) a conductive third layer plated over said second layer and wherein said adhesion, second and third layers are selectively removed from said substrate to define a continuous serpentine signal layer of a predetermined length weaving back and forth upon itself and terminating in at least first and second contact pads;

(c) a first dielectric layer printed over said signal layer and wherein a plurality of apertures are formed therethrough to expose said first and second contact pads;

(d) a conductive ground layer printed over said first dielectric layer, except in the area of said first and second contact pads and having third and fourth contact pads thereto;

(e) means for making electrical contact to said first, second, third and fourth contact pads;

(f) means for hermetically encapsulating said delay line apparatus; and

(g) wherein the inductive and capacitive characteristics of said signal and ground layers and said first dielectric layer relative to one another and between adjacent portions of the serpentine signal layer are such that a signal applied to said first contact pad takes a known time in the range of 1 to 10 nanoseconds to reach said second contact pad.

3. Apparatus as set forth in claim 2 wherein said substrate comprises a ceramic material.

4. Apparatus as set forth in claim 2 wherein said substrate comprises a fiber/resin printed circuit board material.

5. Apparatus as set forth in claim 2 wherein said adhesion layer is comprised of a nickel-chrome alloy.

6. Apparatus as set forth in claim 5 wherein said third and ground layers are comprised of a conductor selected from a group consisting of copper, silver, gold, and nickel.

7. Apparatus as set forth in claim 5 wherein said third layer is copper and said ground layer is nickel.

8. Thin film delay line apparatus comprising:

(a) an insulative substrate;

(b) a conductive signal layer deposited over said substrate to provide a patterned serpentine conductor of a predetermined length and electrical resistance weaving back and forth upon itself and terminating in at least first and second contact pads;

(c) a first dielectric layer printed over said signal layer except in the area of said first and second contact pads;

(d) a conductive ground layer deposited over said first dielectric layer except in the area of said first and second contact pads and having third and fourth contact pads thereto;

(e) means for making electrical contact to said first, second, third and fourth contact pads;

(f) means for encapsulating said delay line apparatus; and

(g) wherein the inductive and capacitive characteristics of said signal and ground layers and said first dielectric layer relative to one another and between adjacent portions of the serpentine signal layer are such that a signal applied to said first contact pad takes a known time in the range of 1 and 10 nanoseconds to reach said second contact pad.

9. Apparatus as set forth in claim 8 wherein said conductive ground layer comprises nickel.

10. Apparatus as set forth in claim 8 wherein said first dielectric layer includes a dopant from a group consisting of magnetic materials including nickel, iron and cobalt.

11. Thin film delay line apparatus comprising:

(a) an insulative support substrate;

(b) a conductive first signal layer deposited over said substrate to provide a patterned conductor of a predetermined length, weaving back and forth upon itself and terminating in at least first and second contact pads;

(c) a first dielectric layer printed over said first signal layer except in the area of said first and second contact pads;

(d) a conductive ground layer deposited over said first dielectric layer except in the area of said first and second contact pads and having third and fourth contact pads thereto;

(e) a second dielectric layer printed over said ground layer except in the area of said first, second, third and fourth contact pads;

(f) a conductive second signal layer deposited over said second dielectric layer to provide a second patterned conductor or a predetermined length weaving back and forth upon itself and terminating in at least fifth and sixth contact pads thereto;

(g) means for making electrical contact to said first, second, third, fourth, fifth, and sixth contact pads;

(h) means for encapsulating said delay line apparatus; and

(i) wherein the inductive and capacitive characteristics between said first and second signal layers, said ground layer and said first and second dielectric layers relative to one another and between adjacent portions of each of the first and second signal layers are such that a signal applied to one of said contact pads takes a known time in the range of nanoseconds to reach a selected other contact pad.

12. Apparatus as set forth in claim 11 wherein said first dielectric layer includes a dopant from a group consisting of magnetic materials including nickel, iron and cobalt.

13. Thin film delay line apparatus comprising:

(a) an insulative support substrate having identical orderings of a plurality of layers formed over upper and lower surfaces of said substrate wherein said identical orderings of layers each comprise;

(i) a conductive signal layer laid over one of said upper and lower surfaces of said surface to provide a serpentine conductor pattern of a predetermined length and weaving back and forth upon itself and terminating in at least first and second contact pads;

(ii) a first dielectric layer laid over said signal layer except in the area of said first and second contact pads; and

(iii) a conductive ground layer deposited over said first dielectric layer, except in the area of said first and second contacts, having third and fourth contact pads thereto;

(b) means for making electrical contact to said first, second, third and fourth contact pads on each surface of said substrate;

(c) means for encapsulating said delay line apparatus; and

(d) wherein the inductive and capacitive characteristics of said signal and ground layers and said first dielectric layer relative to one another and between adjacent portions of the serpentine signal layer on the upper and lower surfaces are such that a signal applied to one of said contact pads takes a known time in the range of nanoseconds to reach a selected other contact pad.

14. Apparatus as set forth in claim 13 including a plurality of apertures formed through said substrate and filled with an electrical conductor to electrically connect the layers on said upper and lower substrate surfaces.