Spatial light modulator

• US 4,954,789 A
• Filed: 09/28/1989
• Issued: 09/04/1990
• Est. Priority Date: 09/28/1989
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Sampsell, Jeffrey B.
• Primary Examiner(s): Moskowitz, Nelson
• Application Number:
  US07/413,924
• Time in Patent Office: 341 Days
• Field of Search: 350/6.5, 350/6.6, 350/269, 350/356, 350/486, 350/487, 358/206, 358/208, 332/7.51
• US Class Current: 359/318
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

An electrostatically deflectable plate spatial light modulator with light reflecting plates (106) composed of aluminum alloy and with symmetrically located supporting hinges (108) connecting the plates (106) to support posts (104); this provides a thick stiff plate and a thin compliant hinges with deflection perpendicular to the plane of the plates.

Claims

1. A spatial light modulator, comprising:

(a) a plurality of pixels;

(b) each of said pixels including

i. an electrostatically deflectable reflecting element over an addressing electrode, and

ii. a plurality of supports for said element, said supports constraining deflection of said element to positions parallel to an undeflected position.

2. The spatial light modulator of claim 1, further comprising:

(a) a plurality of posts with each of said supports connecting one of said elements to one of said posts.

3. The spatial light modulator of claim 2, wherein:

(a) each of said elements is a roughly square plate; and

(b) each of said plates corresponds to four of said supports.

4. The spatial light modulator of claim 2, wherein:

(a) said elements are made of an aluminum alloy.

5. The spatial light modulator of claim 2, further comprising:

(a) a semiconductor body containing addressing circuitry, said addressing electrodes over said addressing circuitry, said posts affixed to but insulated from said body.

6. The spatial light modulator of claim 5, further comprising:

(a) interconnections on the same level as said addressing electrodes and interconnecting said posts.