Apparatus and method for controlling functions of automated gas cabinets
First Claim
1. A method for controlling functions of an automated gas cabinet adapted to supply process gas under pressure through a high pressure area being normally isolated from remaining points of said manifold, said method comprising a purge operation comprising the steps of:
- initially storing data representing selected first and second time intervals in a control system; and
actuating said control system to automatically perform at least one automatic purge cycle including the steps of;
activating venturi means connected to a first point of said manifold outside of said high pressure area for creating a vacuum in all points of said manifold in fluid communication with said first point;
opening a vent valve for a period of time equal to said first selected time interval to place said high pressure area of said manifold in fluid communication with said venturi means; and
following closure of said vent valve, opening a purge valve connected between a supply of purge gas and said high pressure area of said manifold for a period of time equal to said second selected time interval for filling said high pressure area with purge gas.
8 Assignments
0 Petitions
Accused Products
Abstract
Means are provided for adjustably setting and determining the time duration of flow of a purge gas through process gas supply conduits which supply process gases to semiconductor manufacturing operations. These features are used advantageously to facilitate the changing of certain components of the system, such as a tank of toxic process gas, and/or a filter. A plurality of gas storage and distribution cabinets can be controlled from a single remote personal computer. Alternatively, each individual unit can be controlled by means of its own control system. Setpoints defining, for example, time intervals and pressures to be used in controlling the functions of the gas cabinets may be selected and entered through a front panel on the gas cabinet, or through the remote terminal. A print-out of the selected setpoints is provided by the terminal for improved record keeping of safety procedures used. The invention increases the safety of operation of the gas distribution system, and particularly the safety of the component changing procedures, and reduces the time and cost of such procedures, while improving the records kept regarding safety and other operations of the system.
65 Citations
33 Claims
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1. A method for controlling functions of an automated gas cabinet adapted to supply process gas under pressure through a high pressure area being normally isolated from remaining points of said manifold, said method comprising a purge operation comprising the steps of:
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initially storing data representing selected first and second time intervals in a control system; and actuating said control system to automatically perform at least one automatic purge cycle including the steps of; activating venturi means connected to a first point of said manifold outside of said high pressure area for creating a vacuum in all points of said manifold in fluid communication with said first point; opening a vent valve for a period of time equal to said first selected time interval to place said high pressure area of said manifold in fluid communication with said venturi means; and following closure of said vent valve, opening a purge valve connected between a supply of purge gas and said high pressure area of said manifold for a period of time equal to said second selected time interval for filling said high pressure area with purge gas.
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2. Apparatus for controlling functions of an automated gas cabinet adapted to supply process gas through a high pressure area of a manifold to a tool location, said high pressure area being normally isolated from remaining parts of said manifold, said apparatus comprising;
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control circuit means responsive to a purge actuation signal for automatically generating a plurality of time sequentially ordered purge control signals to control the sequencing of at least one purge operation of said apparatus; input means for inputting time duration signals representing first and second time intervals; memory means for storing said time duration signals; first valve means responsive to a first ordered purge control signal for activating venturi means connected to a first point of said manifold outside of said high pressure area for creating a vacuum in all points of said manifold in fluid communication with said first point; vent valve means responsive to a second ordered purge control signal for opening for a period of time equal to said first selected time interval to place said high pressure area of said manifold in fluid communication with said first point; and purge valve means connected between a supply of purge gas and said high pressure area of said manifold and responsive to a third ordered purge control signal following closure of said vent valve means for opening for a period of time equal to said second selected time interval for filling said high pressure area with purge gas.
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3. A method for controlling functions of an automated gas cabinet adapted to supply process gas under pressure through a high pressure area of a manifold to a tool location, said high pressure area being normally isolated from remaining points of said manifold, said method comprising a purge operation comprising steps of:
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initially storing data representing a selected number of purge cycles in a control system; and actuating said control system to automatically perform the selected number of automatic purge cycles, each said purge cycle including the steps of; activating venturi means connected to a first point of said manifold outside of said high pressure area for creating a vacuum on all points of said manifold in fluid communication with said venturi means; temporarily opening a vent valve to place said high pressure area of said manifold in fluid communication with said venturi means; and following closure of said vent valve, temporarily opening a purge valve connected between a supply of purge gas and said high pressure area of said manifold for filling said high pressure area with purge gas. - View Dependent Claims (4, 5, 6, 7, 8)
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9. Apparatus for controlling functions of an automated gas cabinet adapted to supply process gas through a high pressure area of a manifold to a tool location, said high pressure area being normally isolated from remaining points of said manifold, said apparatus comprising;
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control circuit means responsive to a purge actuation signal for automatically generating a plurality of time sequentially ordered purge control signals to control the sequencing of at least one purge operation including at least one purge cycle of said apparatus; input means for initially developing data signals representing a selected number of purge cycles; memory means for storing said data signals representing the selected number of purge cycles; and a plurality of valve means on said manifold responsive to said control circuit means for performing said purge operation including said selected number of purge cycles. - View Dependent Claims (10)
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11. A method for controlling functions of an automated gas cabinet adapted to supply process gas through a manifold to tool location, said method comprising the steps of:
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initially storing in data storage means data indicative of a plurality of selected setpoints in a control system of said gas cabinet, said setpoints being respectively indicative of a selected one of a time interval and a pressure and being adapted for control of a respective function during operation of said gas cabinet; and controlling said function in response to the respective stored setpoints. - View Dependent Claims (12, 13)
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14. Apparatus for controlling functions of an automated gas cabinet adapted to supply process gas through a manifold to a tool location, said apparatus comprising:
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input means for developing input data signals indicative of a selected plurality of setpoints, said setpoints being respectively indicative of a selected one of a time interval and a pressure and being adapted for control of a respective function during operation of said gas cabinet; memory means for storing said signals, and control circuit means responsive to the stored data signals for controlling said functions of said gas cabinet. - View Dependent Claims (15)
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16. Apparatus for controlling functions of an automated gas cabinet adapted to supply process gas through a manifold to a tool location, said apparatus comprising:
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control circuit means for controlling the operation of a plurality of valve means connected to respective points of said manifold for placing the respective points of said manifold in fluid communication with other selected points of said manifold; input means for developing input data signals indicative of a plurality of selected setpoints, said setpoints being respectively indicative of a selected one of a time interval and a pressure and being adapted for control of a respective function during operation of said gas cabinet; and memory means for storing said data signals; said control circuit means controlling the opening and closing of respective ones of said valve means in response to respective data signals representing setpoints indicative of respective time intervals and in response to respective data signals representing setpoints indicative of respective pressures.
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17. An automatic purge-to-change-filter method for an automated gas cabinet adapted to supply process gas successively through a high pressure area and a regulated area of a manifold to a tool location, said regulated area having replaceable filter means for filtering said process gas removably connected thereto, said method comprising the steps of:
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actuating a control system of said gas cabinet to perform the following steps automatically; activating venturi means connected to a first point of said manifold outside of said high pressure area and said regulated area for creating a vacuum on all points of said manifold in fluid communication with said first point; performing a first purge operation of said high pressure area including at least one first purge cycle by placing the high pressure area in fluid communication with said first point; performing a first purge operation of said regulated area including at least one second purge cycle by placing the regulated area in fluid communication with said first point; detecting the replacement of a previously connected filter means with a newly connected filter means; performing a second purge operation of said regulated area including at least one said second purge cycle by placing the regulated area in fluid communication with said first point; performing a second purge operation of said high pressure area including at least one said first purge cycle by placing the high pressure area in fluid communication with said first point; and deactivating said venturi means. - View Dependent Claims (18, 19, 20, 21)
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- 22. Apparatus for facilitating the replacement of a component in a semiconductor process gas supply system, said system comprising main conduit means for conducting said gas to a utilization location, connecting conduit means for connecting said component to said main conduit means, purging means for purging said connecting conduit means to facilitate removal of said component and replacement by another, said purging means comprising means for flowing a purge gas into said connecting conduit means and displacing gas contained therein, control means for controlling the time during which said purge gas flows, said control means including data storage and retrieval means, and input means for varying, setting and storing data determining said time.
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29. A method for facilitating the replacement of components in a semiconductor process gas supply system having a conduit for conducting process gas to a utilization station, said method comprising the steps of:
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purging said conduit, prior to removing a component from said system, by flowing a purge gas through said conduit for a predetermined length of time; selecting said length f time by utilizing adjustable input means for inputting to and storing in pre-programmed general purpose digital computer means signals representing said predetermined length of time, and utilizing said computer means to automatically control said purging step in accordance with said stored signals. - View Dependent Claims (30, 31, 32, 33)
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Specification