Method for producing magnetic recording medium
First Claim
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1. A method for producing a magnetic recording medium in which an iron nitride ferromagnetic thin film containing at least iron and nitrogen is formed on a nonmagnetic substrate, comprising the steps of:
- applying at least one of uncharged nitrogen molecules in an excited state and uncharged nitrogen atoms in an excited state to said nonmagnetic substrate; and
simultaneously applying an uncharged iron vapor flow and a charged ion flow to said substrate to thereby form said thin film on said nonmagnetic substrate.
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Abstract
A method and apparatus for producing a magnetic recording medium having an improved durability with a simple process. Nitrogen molecules and/or nitrogen atoms in an excited state are applied to a nonmagnetic substrate simultaneously with an iron vapor flow and an ion flow. The resulting magnetic recording medium has superior corrosion resistance and can be produced at a high film forming rate, and is especially suitable for high density recording because of its high coercive force.
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15 Claims
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1. A method for producing a magnetic recording medium in which an iron nitride ferromagnetic thin film containing at least iron and nitrogen is formed on a nonmagnetic substrate, comprising the steps of:
- applying at least one of uncharged nitrogen molecules in an excited state and uncharged nitrogen atoms in an excited state to said nonmagnetic substrate; and
simultaneously applying an uncharged iron vapor flow and a charged ion flow to said substrate to thereby form said thin film on said nonmagnetic substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
- applying at least one of uncharged nitrogen molecules in an excited state and uncharged nitrogen atoms in an excited state to said nonmagnetic substrate; and
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