Sacrificial quartz crystal mount
First Claim
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1. A piezoelectric quartz crystal resonator comprised of:
- a package base having a first thermal expansion coefficient;
an active piezoelectric quartz layer including electroded surfaces and with a second thermal expansion coefficient;
mounting pedestals coupled to and cantilevered from said package base and coupled to said active piezoelectric quartz layer, said mounting pedestals capable of exerting mechanical stress on said active piezoelectric quartz layer arising from differences between said first and second thermal expansion coefficients; and
an intermediate layer means coupled to said mounting pedestals and between said active piezoelectric quartz layer and said package base for reducing mechanical stress on said active piezoelectric quartz layer.
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Abstract
In a conventional quartz crystal resonator, a sacrificial quartz layer attached to the mounting posts and between the active, vibrating quartz layer and the package base reduces mechanical stresses on the active quartz layer caused by thermal expansion coefficient differences. The intermediate quartz layer is a sacrificial layer which acts to maintain the spacing of mounting posts.
24 Citations
16 Claims
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1. A piezoelectric quartz crystal resonator comprised of:
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a package base having a first thermal expansion coefficient; an active piezoelectric quartz layer including electroded surfaces and with a second thermal expansion coefficient; mounting pedestals coupled to and cantilevered from said package base and coupled to said active piezoelectric quartz layer, said mounting pedestals capable of exerting mechanical stress on said active piezoelectric quartz layer arising from differences between said first and second thermal expansion coefficients; and an intermediate layer means coupled to said mounting pedestals and between said active piezoelectric quartz layer and said package base for reducing mechanical stress on said active piezoelectric quartz layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification