Multidimensional force sensor
First Claim
Patent Images
1. A multidimensional force sensor, comprising:
- a substantially planar main body having a first aperture and a second aperture;
a plurality of sensor assemblies extending across said first aperture and said second aperture, each such sensor assembly comprising;
a first beam attached at a first end to an edge of said main body adjacent to said aperture and projecting into said aperture;
a second beam attached at a first end to an edge of said main body adjacent to said aperture and directly opposite said first beam and projecting into said aperture;
a response element attached to the second ends of said first beam and said second beam in said aperture; and
first and second piezoresistors, each extending towards said response element from the first end of each of said first and second beams, along a first side of said first and second beams, less than halfway towards said response element, then extending across said first and second beams, and then extending away from said response element along a second side of each of said first and second beams opposite from said first side of said first and second beams, to the first end of each of said first and second beams;
said piezoresistors on said first beams being electrically connected in series;
said piezoresistors on said second beams being electrically connected in series; and
said first and second beams in said sensor assemblies in said first aperture being substantially perpendicular to said first and second beams in said sensor assemblies in said second aperture.
0 Assignments
0 Petitions
Accused Products
Abstract
A multibeam structure measures displacement of one or more response elements to detect multiple components of applied force. The flexible beams are each coupled to a response element which may be displaced by a force arising from linear acceleration, angular acceleration, fluid flow, electric/magnetic/gravitational fields, and others sources. The displacement of the response element is detected with a variety of sensing methods including capacitive and piezoresistive sensing.
98 Citations
10 Claims
-
1. A multidimensional force sensor, comprising:
-
a substantially planar main body having a first aperture and a second aperture; a plurality of sensor assemblies extending across said first aperture and said second aperture, each such sensor assembly comprising; a first beam attached at a first end to an edge of said main body adjacent to said aperture and projecting into said aperture; a second beam attached at a first end to an edge of said main body adjacent to said aperture and directly opposite said first beam and projecting into said aperture; a response element attached to the second ends of said first beam and said second beam in said aperture; and first and second piezoresistors, each extending towards said response element from the first end of each of said first and second beams, along a first side of said first and second beams, less than halfway towards said response element, then extending across said first and second beams, and then extending away from said response element along a second side of each of said first and second beams opposite from said first side of said first and second beams, to the first end of each of said first and second beams; said piezoresistors on said first beams being electrically connected in series; said piezoresistors on said second beams being electrically connected in series; and said first and second beams in said sensor assemblies in said first aperture being substantially perpendicular to said first and second beams in said sensor assemblies in said second aperture. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
Specification