Multi-level deformable mirror device

• US 5,083,857 A
• Filed: 06/29/1990
• Issued: 01/28/1992
• Est. Priority Date: 06/29/1990
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Hornbeck, Larry J.
• Primary Examiner(s): LaRoche, Eugene R.
• Assistant Examiner(s): DINH, TAN X
• Application Number:
  US07/546,465
• Time in Patent Office: 578 Days
• Field of Search: 350/355, 350/356, 350/360, 350/320, 350/632, 350/631, 350/633
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G09F 9/372 the positions of the elements being controlled by the application of an electric field
• CPC Class Codes: H04N 9/3102 using two-dimensional electronic spatial light modulators micromechanical modulators as such G02B26/0833; liquid crystal modulators as such G02F1/13
• CPC Class Codes: H04N 9/3141 Constructional details thereof details not peculiar to the presence of an electronic spatial light modulator G03B21/14
• CPC Class Codes: Y10S 359/90 Methods

Abstract

A bistable deformable mirror device (DMD) pixel architecture is disclosed, wherein the torsion hinges are placed in a layer different from the torsion beam layer. This results in pixels which can be scaled to smaller dimensions while at the same time maintaining a large fractional active area, an important consideration for bright, high-density displays such as are used in high-definition television applications.

Claims

1. The method of constructing an array of pixels, each pixel individually rotatable into at least two states, said method comprising the steps of:

constructing a base structure for supporting all of said pixels of said array,

maintaining said array in a plane separate from the plane of said base, said maintaining step including the step of;

constructing an intermediate structure, comprising at least a hinge, separate from both said base structure and from said pixel and positioned therebetween for connecting said base structure to said pixel for allowing said pixel to deform with respect to said base.

2. The method set forth in claim 1 wherein said array is the visual display of a high density television system.

3. The method set forth in claim 2 wherein said base structure constructing step includes the step of

establishing discrete areas for providing signals for controlling said rotation of said pixels.

4. The method set forth in claim 3 wherein said discrete areas include address electrodes.

5. The method set forth in claim 3 further including the steps of

establishing a substrate layer containing control circuitry;

and

interconnecting said discrete areas to said control circuitry for communicating signals from said control circuitry to said discrete areas.

6. The method of fabricating a deformable mirror device, said method including the steps of:

establishing a substrate having formed thereon address circuitry, and a patterned first spacer wherein said patterns define first support posts;

establishing upon said first spacer address electrodes and deformable hinges connected to said first support posts;

depositing a patterned second spacer wherein said patterns define second support posts overlying said deformable hinges;

establishing a plurality of mirrors supported by said second posts; and

removing said first and second spacers.