Rotating magnetron incorporating a removable cathode

• US 5,100,527 A
• Filed: 10/18/1990
• Issued: 03/31/1992
• Est. Priority Date: 10/18/1990
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Viratec Thin Films, Inc. (Apogee Enterprises Incorporated)
• Inventors: Humberstone, Geoffrey, Stevenson, David E., Bjornard, Erik J.
• Primary Examiner(s): Weisstuch, Aaron
• Application Number:
  US07/600,203
• Time in Patent Office: 530 Days
• Field of Search: 204/298.09, 204/298.22, 204/298.23, 204/298.28
• US Class Current: 204/298.22
• CPC Class Codes: C23C 14/3407 Cathode assembly for sputtering apparatus, e.g. Target
• CPC Class Codes: H01J 37/3405 Magnetron sputtering
• CPC Class Codes: H01J 37/3497 Temperature of target

Abstract

A rotatable magnetron having a cathode and a bearing assembly wherein the cathode may be removed from a coating chamber while the bearing assembly remains in place.

Claims

1. A rotatable magnetron apparatus, comprising:

a bearing housing;

a drive shaft rotatably mounted in said bearing housing with an end thereof extending into an evacuable chamber;

a vacuum seal means for sealing said drive shaft to said bearing housing so that an interior portion thereof is isolated from said chamber; and

means for removably attaching a magnetron cathode to the end of said drive shaft extending into said chamber so that said cathode may be removed from said chamber while said bearing housing remains in place.

2. The apparatus of claim 1 wherein said drive shaft is hollow and open at at least one end.

3. The apparatus of claim 2 further including a cathode and means for flowing cooling fluid to and from said cathode.

4. The apparatus of claim 3 wherein said fluid cooling means includes:

a first conduit extending through said drive shaft and supported therein, and a second conduit extending into said cathode and mounted therein, said second conduit removably attached to said first conduit to be in fluid communication therewith and said second conduit removable with said cathode while said first conduit remains in said drive shaft.

5. The apparatus of claim 4 further including a magnet array supported in said cathode by said second conduit

6. The apparatus of claim 4 wherein said second conduit h a reduced outside diameter at one end thereof to facilitate attachment to said first conduit.

7. The apparatus of claim 6 further including seal means for sealing said first conduit to said second conduit.

8. The apparatus of claim 7 wherein said second conduit is supported by a plug at one end of said cathode so that said cathode can rotate about said second conduit.

9. The apparatus of claim 1 further including a cathode and wherein said removably attaching means includes a mounting member formed at one end of said cathode for removably securing said cathode to said drive shaft.

10. The apparatus of claim 9 wherein said mounting member is removably secured to a flange fixedly attached to said drive shaft.

11. The apparatus of claim 10 wherein said mounting member includes a plug at said one of said cathode, said plug including a flange portion which can be removably secured to said flange.

12. The apparatus of claim 11 further including a mounting seal for forming a vacuum seal between said flange portion and said flange.

13. The apparatus of claim 12 wherein said mounting seal includes at least two vacuum seals disposed in respective grooves in said flange.

14. The apparatus of claim 9 further including a dark space shield surrounding said removably attaching means and removably secured thereto.

15. The apparatus of claim 1 wherein said bearing housing is mounted in a side wall of said chamber.

16. An apparatus for sputtering thin films on a substrate using a rotating magnetron cathode, comprising:

an evacuable coating chamber;

a cantilever mounting unit mounted through a side wall of said coating chamber, said mounting unit including a bearing housing, a drive shaft mounted in said bearing housing for rotating said magnetron cathode, and a vacuum seal means for isolating at least a portion of the interior of said bearing housing from said coating chamber;

means for removably attaching a cathode body of said magnetron cathode to the end of said drive shaft inside said coating chamber so that said cathode body may be detached from said drive shaft and removed from said coating chamber; and

means for transporting a substrate past said magnetron cathode.

17. The apparatus of claim 16 further including a cathode body and wherein said removably attaching means includes a mounting member formed at one end of said cathode body for removably securing said cathode body to said drive shaft.

18. The apparatus of claim 17 wherein said mounting member is removably secured to a flange fixedly attached to said drive shaft.

19. The apparatus of claim 18 wherein said mounting member includes a plug at said one of said cathode body, said plug including a flange portion which can be removably secured to said flange.

20. The apparatus of claim 19 further including a mounting seal for forming a vacuum seal between said flange portion and said flange.

21. The apparatus of claim 20 wherein said mounting seal includes at least two vacuum seals disposed in respective grooves in said flange.

22. The apparatus of claim 19 further including a dark space shield surrounding said plug and said flange.

23. The apparatus of claim 19 wherein said drive shaft is hollow and open at at least one end.

24. The apparatus of claim 23 further including means for flowing cooling fluid to and from said cathode body.

25. The apparatus of claim 24 wherein said fluid cooling means includes:

a first conduit extending through said drive shaft and supported therein, and a second conduct extending into said cathode body and mounted therein, said second conduit removably attached to said first conduit to be in fluid communication therewith and said second conduit removable with said cathode body while said first conduit remains in said drive shaft.

26. The apparatus of claim 25 wherein said second conduit is supported by said plug such that said cathode body can rotate about said second conduit.

27. The apparatus of claim 25 wherein said second conduit has a reduced outside diameter at one end thereof to facilitate attachment to said first conduit.

28. The apparatus of claim 27 further including vacuum seal means for rigidly securing said first conduit to said second conduit.