Photosensitive polyimide compositions
First Claim
1. A thermally stable photosensitive polymer composition comprising a substantially gel-free polyamic acid, polyamic ester or polyimide formed in a solvent comprising a N-methylpyrrolidone-diglyme mixture by the condensation of(a) a bis-(3-amino-4-hydroxyphenyl) composition of the structure ##STR32## where Q is selected from the group consisting of ##STR33## and (b) a dianhydride selected form the group consisting of(1) a bis-(3,4 dicarboxyphenyl) anhydride composition of the structure ##STR34## where Z is selected from the group consisting of ##STR35## and (2) an aliphatic tetracarboxylic anhydride of the form ##STR36## and a photoactive compound.
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Abstract
New photosensitive polyimide compositions and processes of using the same in the fabrication of electronic components are provided. These compositions are comprised of ##STR1## containing polyamic acids and/or the corresponding hydroxy-polyamic esters, or hydroxypolyimides and a photoactive component as an additive or as covalently bonded functionality on the polymer chain. These compositions provide positive or negative patterning options and may be used as conventional resist materials, as imageable dielectric or passivating layers, as high Tg ion implant masks or as imageable lift-off layers in the fabrication of multilevel metal structures.
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23 Claims
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1. A thermally stable photosensitive polymer composition comprising a substantially gel-free polyamic acid, polyamic ester or polyimide formed in a solvent comprising a N-methylpyrrolidone-diglyme mixture by the condensation of
(a) a bis-(3-amino-4-hydroxyphenyl) composition of the structure ##STR32## where Q is selected from the group consisting of ##STR33## and (b) a dianhydride selected form the group consisting of (1) a bis-(3,4 dicarboxyphenyl) anhydride composition of the structure ##STR34## where Z is selected from the group consisting of ##STR35## and (2) an aliphatic tetracarboxylic anhydride of the form ##STR36## and a photoactive compound.
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11. A thermally stable photosensitive polymer composition comprising a polyamic acid, polyamic ester or polyimide formed in a solvent comprising a N-methyl-pyrolidone-diglyme mixture by the condensation of
(a) a bis-(3-amino-4-hydroxyphenyl) composition of the structure ##STR38## where Q is selected from the group consisting of ##STR39## (b) a dianhydride selected from the group consisting of (1) a bis-(3,4 dicarboxyphenyl) anhydride composition of the structure ##STR40## where Z is selected from the group consisting of ##STR41## and (2) an aliphatic tetracarboxylic anhydride of the form ##STR42## where the polyimide is functionalized through its hydroxy groups.
Specification