Apparatus and method of cathodic arc deposition

• US 5,126,030 A
• Filed: 12/10/1990
• Issued: 06/30/1992
• Est. Priority Date: 12/10/1990
• Status: Expired due to Term

• Current Assignee: Klaus Schmidt
• Original Assignee: Klaus Schmidt
• Inventors: Akari, Koichiro, Tamagaki, Hiroshi
• Primary Examiner(s): Weisstuch, Aaron
• Application Number:
  US07/625,013
• Time in Patent Office: 568 Days
• Field of Search: 204/192.38, 204/298.41, 427/37
• US Class Current: 204/192.38
• CPC Class Codes: C23C 14/325 Electric arc evaporation
• CPC Class Codes: H01J 2237/332 Coating
• CPC Class Codes: H01J 37/32055 Arc discharge
• CPC Class Codes: H01J 37/32623 Mechanical discharge control means
• CPC Class Codes: H01J 37/3266 Magnetic control means
• CPC Class Codes: H05K 3/284 for encapsulating mounted components H05K1/185 takes precedence

Abstract

Cathodic arc deposition method and apparatus, including an arc evaporation source containing a film forming material. A substrate is arranged on the central axis line of and in front of the evaporation surface of the arc evaporation source. At least one magnet coil is arranged around the central axis line and between the arc evaporation source and the substrate.

Claims

1. A cathodic arc deposition apparatus, comprising:

an arc evaporation source having an evaporation surface containing a film forming material;

a substrate surface arranged on a central axis line of and facing the evaporation surface of the arc evaporation source; and

at least one magnet coil means for generating magnetic field lines arranged around the central axis line and between the arc evaporation source and the substrate and of a configuration whereby the magnetic field lines are constricted in the space between the evaporation surface and the substrate;

wherein an arc spot generated on the evaporation surface is rotated circularly at a high velocity by a magnetic field generated by the excitation of the at least one magnet coil means and the plasma generated by the arc spot is guided by said magnetic field and is passed through a vacuum space interiorly of the magnet coil means to be introduced onto the substrate surface.

2. The cathodic arc deposition apparatus according to claim 1, wherein:

the coil means is designed to provide a component of the magnetic field in a radial direction with respect to the central axis and at the evaporation surface of at least 10 Gauss and a magnetic field component parallel to the central axis of at least 20 Gauss.

3. The cathodic arc deposition apparatus according to claim 1, wherein:

the coil means is designed to provide an axial component of the magnetic field at the evaporation surface of at least 60 Gauss.

7. The cathodic arc deposition method according to claim 1 or 4, further comprising:

providing a cathode that contains at least one metal selected from Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, and alloys thereof.

4. A cathodic arc deposition apparatus, comprising:

an arc evaporation source containing a film forming material;

a first vacuum chamber containing the arc evaporation source;

a substrate having an unobstructed path directly to an evaporation surface of the arc evaporation source, a line which passes through the substrate and the evaporation surface defining a central axis;

a second vacuum chamber containing the substrate;

a tubular part between the first and second vacuum chambers connecting the first vacuum chamber to the second vacuum chamber; and

at least one magnet coil means for generating magnetic field lines arranged on a circumference of the tubular part and of a configuration whereby the magnetic field lines are constricted in the space between the evaporation surface and the substrate.

5. The cathodic arc deposition apparatus according to claim 4, wherein the coil means includes at least two magnet coils which are arranged side by side on the circumference of the tubular part, along the central axis line of the evaporation surface of the arc evaporation source.

6. The cathodic arc deposition apparatus according to claim 4, wherein the tubular part is an orifice having an opening slightly larger than the diameter of a plasma flow focussed by a magnetic field generated by the excitation of the at least one magnetic coil means.

8. A cathodic arc deposition method for forming a film, comprising the steps of:

generating an arc plasma between an anode and a cathode, said cathode being an arc evaporation source;

evaporating a portion of an evaporation surface of said cathode due to heating of said portion by the arc plasma impinging upon said portion;

positioning a substrate surface to be facing said arc plasma and to have an unobstructed path directly between said substrate surface and said evaporation surface, a line from the center of said substrate surface through said cathode defining a central axis;

arranging at least one magnetic coil at a coaxial position on the central axis and between said substrate surface and the evaporation source, said at least one magnetic coil configured so that the magnetic field lines are constricted in the space between the evaporation surface and the substrate;

rotating the arc spot circularly at a high velocity, by application of forces on the arc generated by a magnetic field component along a radial direction with respect to the central axis of the magnetic field;

passing the plasma generated from the arc spot through a vacuum space inside the coil along the magnetic lines of force of the magnetic field to be introduced onto the substrate for coating.

9. A cathodic arc deposition method, comprising the steps of:

arranging an arc evaporation source containing a film forming material as a cathode and a substrate in a vacuum chamber so that there are no obstructions directly between the substrate and the evaporation source;

generating a magnetic field so that magnetic field lines are constricted in the space between the evaporation surface and the substrate;

generating an arc spot on the evaporation surface of the arc evaporation source;

circularly rotating the arc spot at a high velocity on the evaporation surface of the arc evaporation source, due to interaction of the arc with the magnetic field; and

introducing the plasma generated by the arc spot onto the substrate by guiding the plasma along the magnetic lines of force of the magnetic field.

10. The cathodic arc deposition method according to claim 9, wherein the film forming material is at least one metal material selected from Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, and alloys thereof, and a reactive gas to react with the metal materials is introduced into the vacuum chamber.

11. The cathodic arc deposition method according to claim 10, wherein the partial pressure of the reactive gas is 1 m Torr or more.

12. The cathodic arc deposition method according to claim 10, wherein the film forming material is at least one metal material selected from Ti, Zr, and alloys thereof, and the reactive gas is a gas containing nitrogen gas, the partial pressure of the nitrogen gas being 1 m Torr or more.

13. The cathodic arc deposition method according to claim 9, wherein a bias voltage in the range of -30 V to -150 V is applied to the substrate.

14. The cathodic arc deposition method according to claim 9, wherein a bias voltage applied to the substrate is controlled, thereby making the film to be formed on the substrate exhibit a desired color toning.

15. A cathodic arc depositon apparatus, comprising:

an arc evaporation source having an evaporation surface;

a substrate surface arranged to be facing the evaporation surface of the arc evaporation source; and

a magnetic coil means for producing a magnetic field arranged between the arc evaporation source and the substrate and of a configuration whereby the magnetic field lines are constricted in the space between the evaporation source and the substrate.

16. An apparatus according to claim 15, further comprising:

an inner diameter of a vacuum chamber that is surrounded by the coil means which is smaller than a largest diameter of the the evaporation surface.

17. A cathodic arc deposition method for forming a film, comprising the steps of:

positioning a substrate surface to be spaced away from and facing an evaporation surface of an arc evaporation source;

arranging a magnetic coil between the substrate surface and the evaporation surface and configuring said at least one magnetic coil so magnetic field lines created thereby are constricted in the space between the evaporation surface and the substrate; and

generating an arc plasma between an anode and the evaporation surface, said evaporation surface acting as a cathode.

18. An apparatus according to claim 17, wherein:

an inner diameter of a vacuum chamber which is surrounded by said magnetic coil is smaller than a largest diameter of the the evaporation surface.