Field emission cathode of bio-molecular or semiconductor-metal eutectic composite microstructures

• US 5,138,220 A
• Filed: 12/05/1990
• Issued: 08/11/1992
• Est. Priority Date: 12/05/1990
• Status: Expired due to Term

• Current Assignee: Science Applications International Corporation
• Original Assignee: Science Applications International Corporation
• Inventors: Kirkpatrick, Douglas A.
• Primary Examiner(s): Yusko, Donald J.
• Assistant Examiner(s): Patel, Ashok
• Application Number:
  US07/623,623
• Time in Patent Office: 615 Days
• Field of Search: 313/309, 313/310, 313/336, 428/389
• US Class Current: 313/309
• CPC Class Codes: H01J 1/3042 microengineered, e.g. Spindt-type
• CPC Class Codes: Y10T 428/2958 Metal or metal compound in coating

Abstract

A field emission cathode of bio-molecular or eutectic composite microstructure having rod-like tips protruding from a uniform base and covered with a thin layer of semiconductor material for producing macroscopic beam current densities without formation of surface plasma.

Claims

1. A field emission cathode for an electron-beam source for producing macroscopic beam current densities without forming a surface plasma, comprising:

a semiconductor-metal eutectic composite microstructure including an array of rod-like tips protruding from a matrix;

a coating of a semiconductor and/or a metal on a top of the tips; and

a layer of a metal contacting both the tips and the matrix for bridging Schottky barriers between the matrix and the tips.

2. The cathode of claim 1 wherein the layer of metal comprises gold.

3. An electrode beam source comprising:

a closed chamber;

an anode in the chamber;

a field emission cathode in the chamber spaced from the anode and comprising a semiconductor-metal eutectic composite microstructure including an array of rod-like tips protruding from a matrix, a coating of a semiconductor and/or a metal on top of the tips and a layer of metal contacting both the tips and the matrix for bridging Schottky barriers between the matrix and the tips;

means for developing a controlled atmosphere in the chamber; and

means for generating an electric field between the anode and the cathode to produce an electron beam between the cathode and the anode having macroscopic beam current densities without forming a surface plasma on the cathode.

4. The source of claim 3 wherein the layer of metal comprises gold.