×

Method and apparatus to reduce Hg loss in rf capacitively coupled gas discharges

  • US 5,146,140 A
  • Filed: 06/18/1991
  • Issued: 09/08/1992
  • Est. Priority Date: 06/18/1991
  • Status: Expired due to Term
First Claim
Patent Images

1. A capacitively coupled lamp comprisinga lamp envelope made of a light transmitting material, said envelope having an outer surface and an inner surface, said inner surface enclosing a fill material which forms during discharge a plasma which emits ultraviolet radiation;

  • a phosphor layer covering the inner surface of said lamp envelope and emitting visible light when excited by ultraviolet radiation;

    a pair of outer conductors positioned on the outer surface of said lamp envelope;

    a pair of inner conductors positioned on the inner surface of said lamp envelope and aligned with said pair of outer conductors and electrically insulated therefrom;

    an rf source coupled to said outer conductors capable of producing low frequency power below 100 MHz;

    wherein low frequency power below 100 MHz applied to said outer conductors induces an electric field in said lamp and discharge therein without loss of said fill material.

View all claims
  • 3 Assignments
Timeline View
Assignment View
    ×
    ×