Multilayer anti-reflection coating using zinc oxide to provide ultraviolet blocking

• US 5,147,125 A
• Filed: 08/24/1989
• Issued: 09/15/1992
• Est. Priority Date: 08/24/1989
• Status: Expired due to Fees

• Current Assignee: Viratec Thin Films, Inc. (Apogee Enterprises Incorporated)
• Original Assignee: Viratec Thin Films, Inc. (Apogee Enterprises Incorporated)
• Inventors: Austin, R. Russel
• Primary Examiner(s): Arnold, Bruce Y.
• Assistant Examiner(s): Parsons, David R.
• Application Number:
  US07/398,136
• Time in Patent Office: 1,118 Days
• Field of Search: 350/1.6, 350/1.7, 350/311, 350/164, 350/165, 350/166
• US Class Current: 359/359
• CPC Class Codes: C03C 17/3417 all coatings being oxide coatings
• CPC Class Codes: C03C 17/3452 comprising a fluoride
• CPC Class Codes: G02B 1/115 Multilayers

Abstract

A multilayer, thin-film, broad-band, anti-reflection structure applicable to transparent substrates. The present invention makes use of the UV absorption properties of zinc oxide to provide UV rejection for wavelengths shorter than 380 nm, while providing anti-reflection properties in the visible region of the spectrum. The structure provides a reflection value less than 0.25% in the visible region of the spectrum, and blocks 99 percent of UV radiation below 380 nm.

Claims

1. An anti-reflection coating formed on a surface of a substrate, comprising:

five layers, numbered consecutively beginning with the layer furthest from said substrate, wherein at least the third layer is zinc oxide having an optical thickness at a wavelength of about 520 nanometers of at least about six-tenths of a wavelength, and the four other layers each have an optical thickness at a wavelength of about 520 nanometers less than about one-third of a wavelength;

the first layer having an index of refraction less than that of said substrate;

the second and fourth layers having a refractive index greater than zinc oxide; and

the fifth layer having a refractive index less than the fourth layer but greater than that of said substrate.

2. The coating of claim 1 further including another layer of material disposed between the fifth layer and said substrate wherein the index of refraction of said another layer is less than that of said substrate, and its optical thickness at a wavelength of about 520 nanometers is about one-half of a wavelength.

3. An anti-reflection coating formed on a surface of a substrate, comprising:

five layers, numbered consecutively beginning with the layer farthest from the substrate, wherein the second layer is zinc oxide having an optical thickness at a wavelength of about 520 nanometers of greater than about three-quarters of a wavelength, and the four other layers each having an optical thickness at a wavelength of about 520 nanometers less than or equal to about one-quarter of a wavelength;

the first layer having an index of refraction less than the substrate;

the third layer having an index of refraction greater than zinc oxide;

the fourth layer having an index of refraction less than zinc oxide; and

the fifth layer having a refractive index greater than the substrate and greater than fourth layer.

4. An anti-reflection, coating formed on a surface of a substrate, comprising:

four layers, numbered consecutively beginning with the layer farthest from the substrate, wherein the second layer is zinc oxide having an optical thickness at a wavelength of about 520 nanometers of about one wavelength, and wherein the three other layers each have an optical thickness at a wavelength of about 520 nanometers less than or equal to about one-quarter of a wavelength;

the first layer having an index of refraction less than the substrate;

the third layer having an index of refraction different from less than zinc oxide; and

the fourth layer having a refractive index greater than the third layer and greater than the substrate.

5. A coating formed on the surface of an article comprising:

a first layer of a material having an index of refraction between about 1.35 and 1.50 and an optical thickness at a wavelength of about 520 nanometers of about one-quarter of a wavelength;

a second layer of a material having an index of refraction between about 2.15 and 2.60 and an optical thickness at a wavelength of about 520 nanometers of less than about one-quarter of a wavelength;

a third layer of zinc oxide having an optical thickness at a wavelength of about 520 nanometers of about six-tenths of a wavelength;

a fourth layer of a material having an index of refraction between about 2.15 and 2.60 and an optical thickness at a wavelength of about 520 nanometers less than about one-quarter of a wavelength; and

a fifth layer of a material having an index of refraction less than the index of refraction of the fourth layer but greater than the index of refraction of the article, and an optical thickness at a wavelength of about 520 nanometers of about one-third of a wavelength;

said fifth layer being closest to the surface of the article.

6. The coating of claim 5 wherein the optical thickness of said second layer at a wavelength of about 520 nanometers does not exceed one-eighth of a wavelength.

7. The coating of claim 5 or 6 wherein said first layer is a layer of silicon oxide, said second and fourth layers are layers of titanium oxide, and said fifth layer is a layer of zinc oxide.

8. The coating of claim 5 further including another layer of material disposed between said fifth layer and the surface wherein the index of refraction is less than that of the article and its optical thickness at wavelength of about 520 nanometers is about one-half of a wavelength.

9. A coating formed on the surface of an article comprising:

a first layer of a material having an index of refraction between about 1.35 and 1.50 and an optical thickness at a wavelength of about 520 nanometers of about one-quarter of a wavelength;

a second layer of zinc oxide and having an optical thickness at a wavelength of about 520 nanometers of at least about three-quarters of a wavelength;

a third layer of a material having an index of refraction greater than zinc oxide and an optical thickness at a wavelength of about 520 nanometers between about one-eighth and one-sixteenth of a wavelength;

a fourth layer of a material having an index of refraction less than zinc oxide and an optical thickness at a wavelength of about 520 nanometers between about one-eighth and one sixteenth of a wavelength; and

a fifth layer of a material having an index of refraction greater than that of the article and the fourth layer, and an optical thickness at a wavelength of about 520 nanometers less than about one-quarter of a wavelength, said fifth layer being closest to the surface of the article.

10. The coating of claim 9 wherein said first layer is a layer of magnesium fluoride, said third layer is a layer of titanium oxide, said fourth layer is a layer of silicon oxide, and said fifth layer is a layer of zinc oxide.

11. The coating of claim 9 further including another layer of material disposed between said fifth layer and the surface wherein the index of refraction of said another layer is less than that of the article and its optical thickness at a wavelength of about 520 nanometers is about one-half of a wavelength.

12. An anti-reflection coating formed on the surface of a substrate, comprising:

four adjacent layers, numbered consecutively beginning with the layer farthest from the substrate, including a layer of zinc oxide for blocking wavelengths shorter than about 375 nanometers;

said first layer having an index of refraction between about 1.35 and 1.5 and an optical thickness at a wavelength of about 520 nanometers of about one-quarter of a wavelength;

said second layer being said layer of zinc oxide and having an optical thickness at a wavelength of about 520 nanometers of about one wavelength;

said third layer having an index of refraction less than zinc oxide and an optical thickness at a wavelength of about 520 nanometers between about one-eighth and one-sixteenth of a wavelength; and

said fourth layer having an index of refraction greater than that of the substrate and said third layer and an optical thickness at a wavelength of about 520 nanometers between about one-eighth and one sixteenth of a wavelength.

13. The coating of claim 12, wherein said first layer is a layer of magnesium fluoride, said third layer is a layer of silicon oxide, and said fourth layer is a layer of zinc oxide.

14. The coating of claim 12 further including another layer of material disposed between said fourth layer and the substrate wherein the index of refraction of said another layer is less than that of the substrate, and its optical thickness at a wavelength of about 520 nanometers is about one-half of a wavelength.

15. The coating of claims 5, 9 or 12 wherein said article comprises a substantially optically transparent substrate having two surfaces and the coating is formed on one surface of said substrate.