Metrological apparatus and calibration method therefor

• US 5,150,314 A
• Filed: 06/22/1990
• Issued: 09/22/1992
• Est. Priority Date: 06/23/1989
• Status: Expired due to Term

• Current Assignee: Taylor Hobson Limited (Ametek Incorporated)
• Original Assignee: Rank Taylor Hobson Limited
• Inventors: Scott, Paul J., Garratt, John D., Buehring, Ian K.
• Primary Examiner(s): Lall, Parshotam S.
• Assistant Examiner(s): ZANELLI, MICHAEL J
• Application Number:
  US07/542,718
• Time in Patent Office: 823 Days
• Field of Search: 364/551.01, 364/560, 364/571.01, 364/571.02, 364/474.28, 364/474.29, 364/573, 364/724.01, 364/572, 364/581, 33/551, 33/503, 33/504, 341/139, 341/140
• US Class Current: 702/94
• CPC Class Codes: G01B 7/28 for measuring contours or curvatures
• CPC Class Codes: G01B 7/34 for measuring roughness or irregularity of surfaces

Abstract

A metrological apparatus for measuring form and texture of a surface employs an inductive transducer producing an AC gauge signal, and a tracking AC analogue to digital converter. In order to avoid errors in the output signal at a relatively high speed of traverse of the surface due to a non-flat frequency response of the converter, the output signal is processed by a digital filter to provide a combined frequency response which is flat over a desired range. In order to avoid errors in the output signal due to non-linearity of the transducer, a square or cubic correction is applied to the signal. A method calibrating the apparatus to obtain coefficients for the square and cube terms in the correction process is also described.

Claims

1. A metrological apparatus for measuring physical surface geometry, said apparatus comprising a transducer, said transducer producing an analogue electrical signal representative of a characteristic of a physical surface the geometry of which is to be measured, and an analogue to digital converter the gain of which varies with frequency over a particular frequency range, said analogus electrical signal being input to said analogue to digital converter to be analogue to digital converted thereby into a digital signal,

said apparatus further comprising processing means for processing said digital signal to compensate for said variation of gain with frequency over said particular range.

2. An apparatus as claimed in claim 1, wherein said processing means is arranged to receive a series of samples from said analogue to digital converter and to output a series of compensated samples, the value of a said compensated sample being determined by combining weighted values of a plurality of received samples and a plurality of preceding compensated samples.

3. An apparatus as claimed in claim 2, wherein said processing means includes a digital filter.

4. An apparatus as claimed in claim 1 wherein said analogue to digital converter comprises a tracking AC analogue to digital converter.

5. An apparatus as claimed in claim 1 wherein said transducer has a normal range over which said analogue electrical signal is substantially linearly related to a position detected by said transducer, and an extended range beyond said normal range, over which said analogue electrical signal is non-linearly related to a position detected by said transducer, and further comprising compensator means for processing one of said analogue electrical signal and said digital signal to generate a compensated signal which is compensated for non-linearity over said extended range so that said compensated signal is substantially linearly related to the detected position over said normal and extended ranges of said transducer.

6. An apparatus as claimed in claim 5, wherein said compensator means is operable to use a calibration constant B and the square of said one of said analogue electrical signal and said digital signal in producing said compensated signal.

7. An apparatus as claimed in claim 5, wherein said compensator means is operable to use a calibration constant C and the cube of said one of said analogue electrical signal and said digital signal in producing said compensated signal.

8. An apparatus as claimed in claim 5 wherein said transducer comprises a stylus and said apparatus further comprises drive means for traversing the transducer across a surface with said stylus in contact with said surface,

said stylus being mounted by a pivot which is offset in the traverse direction from the point of contact between said stylus and said surface, and said apparatus further comprising means for providing a traverse position signal representative of the position of said pivot in the traverse direction, and traverse signal compensator means for processing said traverse position signal to compensate for variations in the difference between the position of said pivot in the traverse direction and the position of said point of contact in the traverse direction due to pivoting of said stylus.

9. An apparatus as claimed in claim 5, wherein said transducer comprises a stylus and the apparatus further comprises drive means for traversing said stylus across a surface in contact therewith, and means for providing a traverse position signal in accordance with the position in the transverse direction of the point of contact of said stylus with said surface, the position of said point of contact in the traverse direction varying with the position of said point of contact in a direction towards and away from said surface and the apparatus further comprising traverse signal compensator means to process said traverse position signal to compensate for said variations in the position of said point of contact.

10. An apparatus as claimed in claim 1, wherein said transducer comprises a pair of symmetrical coils and a core movable relative to said coils, the coils being connected as two arms of a bridge circuit.

11. A metrological apparatus comprising a transducer, said transducer producing an electrical signal representative of a surface characteristic and having a normal range over which said electrical signal is substantially linearly related to a position detected by said transducer and an extended range beyond said normal range, over which said electrical signal is non-linearly related to a position detected by said transducer,

said apparatus further comprising compensator means for processing said electrical signal to generate a compensated signal which is compensated for non-linearity over said extended range so that said compensated signal is substantially linearly related to the detected position over said normal and extended ranges of said transducer.

12. An apparatus as claimed in claim 11, wherein said compensator means is operable to use the square of said electrical signal and a calibration constant B in producing said compensated signal.

13. An apparatus as claimed in claim 11, wherein said compensator means is operable to use the cube of said electrical signal and a calibration constant C in producing said compensated signal.

14. An apparatus as claimed in claim 11, wherein said transducer comprises a stylus and said apparatus further comprises drive means for traversing the transducer across a surface with said stylus in contact with said surface,

said stylus being mounted by a pivot which is offset in the transverse direction from the point of contact between said stylus and said surface, and said apparatus further comprising means for providing a transverse position signal representative of the position of said pivot in the transverse direction, and traverse signal compensator means for processing said transverse position signal to compensate for variations in the difference between the position of said pivot in the traverse direction and the position of said point of contact in the traverse direction due to pivoting of said stylus.

15. An apparatus as claimed in claim 11, wherein said transducer comprises a stylus and the apparatus further comprises drive means for traversing said stylus across a surface in contact therewith, and means for providing a traverse position signal in accordance with the position in the traverse direction of the point of contact of said stylus with said surface, the position of said point of contact in the traverse direction varying with the position of said point of contact in a direction towards and away from said surface and the apparatus further comprising traverse signal compensator means to process said traverse position signal to compensate for said variations in the position of said point of contact.

16. A metrological apparatus comprising a transducer, said transducer comprising a stylus and producing an electrical signal representative of a characteristic of a surface across which the stylus is traversed while in contact therewith, and the apparatus further comprising drive means for traversing said stylus across a surface in contact therewith and means for providing a traverse position signal in accordance with the position in the traverse direction of the point of contact of said stylus with said surface, the position of said point of contact in the traverse direction varying with the position of said point of contact in a direction towards and away from said surface, and the apparatus further comprising traverse signal compensator means to process the traverse position signal to compensate for said variations in the position of said point of contact.

17. An apparatus according to claim 16 in which said stylus is mounted by a pivot which is offset in the traverse direction from said point of contact, said variation in the position in the traverse direction of said point of contact with the position of said point of contacting a direction towards and away from said surface comprises variation in the distance in the traverse direction between the position of said point of contact and the position of said pivot due to pivoting of said stylus, said traverse position signal represents the position of said pivot in the traverse direction, and said traverse signal compensator means processes said traverse position signal to compensate for variations in the said distance.

18. An apparatus as claimed in claim 16 wherein said traverse signal compensator means is operable to use said electrical signal and a calibration constant D in processing said traverse position signal.

19. An apparatus as claimed in claim 16 wherein said traverse signal compensator means is operable to use the square of said electrical signal and a calibration constant E in processing said traverse position signal.

20. A method of calibration of an apparatus which apparatus comprises a transducer, means to traverse said transducer over a surface, and means to output a traverse position signal representative of the position of the transducer in the traverse direction, said transducer outputting a transducer output signal representative of a characteristic of said surface, and at least a first one of said transverse position signal and said transducer output signal undergoing a variation from a linear relationship with the property represented thereby with variation, at least over a part of the range of said transducer, in a position of said surface detected by said transducer, said apparatus further comprising compensator means for processing said first signal to compensate said first signal for said variation undergone by said first signal, said compensator means using at least one of said output signal, the square of the output signal and the cube of the output signal in said processing together with at least one calibration constant,

and said method of calibration comprising the steps of traversing said transducer over a surface of known form, storing a series of values of said output signal obtained during said traverse, setting an initial value for said at least one calibration constant, and determining a correction to said at least one calibration constant so that the stored signals as processed by said compensator means using said at least one calibration constant following correction tend to equal those signals which would be expected to be provided from a traverse of the surface of known form by an apparatus providing fully compensated signals.

21. A method as claimed in claim 20, wherein said step of determining a correction includes the step of calculating a difference measure for each stored value of said output signal involving a variable correction to said at least one calibration constant, and calculating values of said corrections which minimizes the sum of the squares of the difference measure.