Semiconductor wafer marking for identification during processing

• US 5,175,774 A
• Filed: 10/16/1990
• Issued: 12/29/1992
• Est. Priority Date: 10/16/1990
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Jurica, Leo B., Truax, Rodney D.
• Primary Examiner(s): COUSO, JOSE L
• Application Number:
  US07/598,110
• Time in Patent Office: 805 Days
• Field of Search: 382/1, 382/8, 382/11, 382/10, 382/48, 382/61, 358/101, 358/106, 235/435, 235/456, 235/494, 356/71, 364/488, 364/489, 364/490, 364/491
• US Class Current: 382/145
• CPC Class Codes: B44B 7/00 Machines, apparatus or hand tools for branding, e.g. using radiant energy such as laser beamsburning or charring wood stock B27M1/06
• CPC Class Codes: G06K 1/126 by photographic or thermographic registration recording apparatus for measuring instruments G01D15/00
• CPC Class Codes: G06K 19/06009 with optically detectable marking G06K19/063, G06K19/08 take precedence
• CPC Class Codes: G06K 2019/06253 for a specific application
• CPC Class Codes: H01L 2223/54406 comprising alphanumeric information
• CPC Class Codes: H01L 2223/54493 Peripheral marks on wafers, e.g. orientation flats, notches, lot number
• CPC Class Codes: H01L 23/544 Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps test patterns for characterising or monitoring manufacturing processes H01L22/00
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A semiconductor wafer (50) is inscribed by a laser scribe system with a numeric wafer identifying number in binary dot-array encoded form to facilitate machine readability. A matrix (20) of predetermined dot locations on the wafer defines a series of parallel columns (e.g. 28) of dot locations, each column corresponding to a respective digit of the ID number. In each column, a number of dots equal to the numeric value of the corresponding digit plus one (N+1) is marked in a contiguous series starting from a baseline row (27,39) of the matrix. A pair of dot arrays (20,30) thus formed are aligned for convenient validity checking. The wafer area required for a dot-array encoded ID number is less than the area required to write a single digit of the ID number in alphanumeric form (14).

Claims

1. A method of marking a semiconductor wafer for identification using a computer-controlled laser scribe system, the method comprising:

determining a unique identifying number consisting of an ordered series of digits for identifying the wafer;

forming data in the computer corresponding to a first matrix of dot locations on the wafer, the first matrix consisting of a series of parallel columns of dot locations, each column corresponding to a respective one of the digits and including a predetermined origin dot location, all of the origin dot locations being aligned such that the origin dot locations together form a first baseline, said first baseline extending normal to the columns;

encoding each digit in the computer to form a corresponding number of dots M, where M is an integer equal to the numeral value of the corresponding digit of the identifying number plus one;

in each first matrix column, marking M dots on the wafer in a contiguous series of dot locations that beings at the first baseline, thereby forming a first dot array that represents the identifying number;

forming data in the computer corresponding to a second matrix of dot locations on the wafer non-overlapping the first matrix, the second matrix consisting of a second series of parallel columns of dot locations, each of the second matrix columns including a predetermined origin dot location, and all of the second matrix origin dot locations being aligned so that the second matrix origin dot locations together form a baseline of the second matrix;

aligning the first matrix and the second matrix such that each column of a respective one of the matrices is collinear with a corresponding column of the other matrix;

orienting the second matrix relative to the first matrix so that the second matrix baseline is spaced apart from the first matrix baseline and both the first and second matrices extend in between the first and second baselines; and

in each second matrix column, marking M dots on the wafer in a continuous series of dot locations that beings at the second baseline, thereby forming a second dot array that represents the identifying number.

2. A method according to claim 1 further comprising the steps of:

in the first array, in each column, determining a first distance between the marked dot furthest from the corresponding origin dot location and the first baseline;

in the second array, in each column, determining a second distance between the marked dot furthest from the corresponding origin dot location and the second baseline;

in each column, comparing the first distance to the second distance; and

determining, for each column, whether or not the first and second distances are equal to within a predetermined tolerance, thereby checking the validity of the wafer marking.