Metal single crystal line having a particular crystal orientation

  • US 5,187,561 A
  • Filed: 06/29/1990
  • Issued: 02/16/1993
  • Est. Priority Date: 07/01/1989
  • Status: Expired due to Term
First Claim
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1. A semiconductor device comprising:

  • a semiconductor substrate having active regions electrically isolated from each other on a predetermined surface thereof, anda single layer or multilayer electrode line arranged on said semiconductor substrate through an insulating layer,wherein at least one layer of said electrode line is made of a metal single crystal having closed-packed planes and at least one closed-packed plane of said crystal is arranged parallel to the longitudinal direction of said electrode line, said at least one closed-packed plane being present at a plane other than a surface plane of said electrode line.

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