Lead inspection method using a plane of light for producing reflected lead images

• US 5,212,390 A
• Filed: 05/04/1992
• Issued: 05/18/1993
• Est. Priority Date: 05/04/1992
• Status: Expired due to Term

• Current Assignee: Freescale Semiconductor, Inc. (NXP Semiconductors NV)
• Original Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Inventors: Wang, Shay-Ping T., LeBeau, Christopher J.
• Primary Examiner(s): Nelms, David C.
• Assistant Examiner(s): LE, QUE TAN
• Application Number:
  US07/878,371
• Time in Patent Office: 379 Days
• Field of Search: 250/561, 250/563, 250/560, 356/376, 356/394, 356/237, 356/375, 358/106, 358/107, 29/705, 29/709, 29/710, 29/566.3
• US Class Current: 250/559.08
• CPC Class Codes: G01R 31/308 using non-ionising electromagnetic radiation, e.g. optical radiation investigating or analysing materials by the use of optical means G01N21/00; image analysis G06T7/00
• CPC Class Codes: Y10T 29/53022 with means to test work or product

Abstract

Light (19) is projected at an incidence angle (29) onto a plurality of leads (12, 13). The light (19) is simultaneously reflected from each of the plurality of leads (12, 13). The light that is simultaneously reflected (24, 26) from each lead (12, 13) is detected. A cotangent function of the incidence angle (29) is utilized to detect an amount of displacement (32) of at least one of the plurality of leads.

Claims

1. A lead inspection method comprising:

providing a semiconductor package having a plurality of leads along at least one side of the package;

illuminating a portion of each lead with a plane of light wherein an incidence angle is formed between the plane of light and each lead, the plane of light producing a reflected lead image for the portion of each lead;

simultaneously detecting each reflected lead image;

determining a position for each reflected lead image;

determining an amount of variation between a position of each reflected lead image and a predetermined image position by using a vision system having a solid state camera; and

using the amount of variation and the incidence angle for determining a distance each lead is displaced from a predetermined coplanar position.

2. The method of claim 1 wherein illuminating the portion of each lead with the plane of light includes creating the plane of light by projecting a laser beam through a semi-cylindrical lens.

3. The method of claim 1 wherein using the amount of variation and the incidence angle for determining the distance each lead is displaced includes multiplying the amount of variation times a cotangent of the incidence angle.

4. The method of claim 1 wherein illuminating the portion of each lead with the plane of light wherein the incidence angle is formed includes illuminating the portion of each lead with the plane of light having approximately a 45 degree incidence angle.

5. The method of claim 1 wherein illuminating the portion of each lead with the plane of light includes illuminating the portion of each lead with the plane of light having a thickness between approximately twenty-five and fifty microns.

6. A method of inspecting leads of a semiconductor package comprising;

providing a semiconductor package having a plurality of leads;

projecting a plane of light onto the plurality of leads thereby producing a reflected lead image of each lead of the plurality of leads wherein an incidence angle is formed between the plane of light and the plurality of leads;

simultaneously detecting a position of the reflected lead image of each lead;

determining an amount of variation between each lead reflected image and a predetermined reflected position; and

determining a distance each lead is displaced by using the amount of variation and the incidence angle.

7. The method of claim 6 wherein projecting the plane of light onto the plurality of leads includes producing the plane of light by shining the output of a laser diode through a semi-cylindrical lens.

8. The method of claim 6, wherein determining the amount of variation between each reflected lead image includes using a vision system to determine a relative variation between each lead of the plurality of leads.

9. The method of claim 6 wherein determining the distance each lead is displaced by using the amount of variation and the incidence angle includes multiplying the variation times a cotangent function of the incident angle.

10. A lead inspection method comprising:

projecting light onto a plurality of leads wherein the light forms an incidence angle;

detecting reflected light that is simultaneously reflected from the plurality of leads;

calculating a distance of displacement for at least one lead of the plurality of leads by using a cotangent of the incidence angle.

11. The method of claim 10 wherein projecting light onto the plurality of leads includes projecting a plane of light onto the plurality of leads.

12. The method of claim 11 wherein projecting the plane of light onto the plurality of leads includes projecting the plane of light having a thickness of between approximately twenty-five and fifty microns.

13. The method of claim 10 wherein detecting reflected light that is simultaneously reflected from the plurality of leads includes using a vision system for detecting a position of the reflected light from each lead and determining a variation between the position and a predetermined reflected position.