Plate-mode ultrasonic structure including a gel

• US 5,212,988 A
• Filed: 10/10/1991
• Issued: 05/25/1993
• Est. Priority Date: 02/29/1988
• Status: Expired due to Fees

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Costello, Benedict J., Wenzel, Stuart W., White, Richard M.
• Primary Examiner(s): ARANA, LOUIS M
• Application Number:
  US07/775,631
• Time in Patent Office: 593 Days
• Field of Search: 73/599, 73/602, 73/590, 73/597, 73/589, 73/601, 73/632, 310/313 R, 310/313 A, 310/313 B, 333/147, 333/149
• US Class Current: 73/599
• CPC Class Codes: B01L 2300/0663 Whole sensors
• CPC Class Codes: B01L 2300/1827 using resistive heater
• CPC Class Codes: B01L 2400/0421 electrophoretic flow
• CPC Class Codes: B01L 3/5027 by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip B01L3/5023 takes precedence; micromixers B01F33/30; microreactors for synthesis B01J19/0093; microcapillary devices in general B81B1/00
• CPC Class Codes: G01H 13/00 Measuring resonant frequency
• CPC Class Codes: G01H 17/00 Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves, not provided for in the preceding groups see provisionally also G01H1/00
• CPC Class Codes: G01L 9/0025 with acoustic surface waves
• CPC Class Codes: G01N 2291/014 Resonance or resonant frequency
• CPC Class Codes: G01N 2291/0255 (Bio)chemical reactions, e.g. on biosensors
• CPC Class Codes: G01N 2291/0256 Adsorption, desorption, surface mass change, e.g. on biosensors
• CPC Class Codes: G01N 2291/02818 Density, viscosity
• CPC Class Codes: G01N 2291/02827 Elastic parameters, strength or force
• CPC Class Codes: G01N 2291/02854 Length, thickness
• CPC Class Codes: G01N 2291/0427 Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
• CPC Class Codes: G01N 29/022 Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices microdevices per se B81B
• CPC Class Codes: G01N 29/2437 Piezoelectric probes
• CPC Class Codes: G01P 15/08 with conversion into electric or magnetic values
• CPC Class Codes: G10K 11/36 Devices for manipulating acoustic surface waves electro-acoustic amplifiers H03F13/00; networks comprising electro-acoustic elements H03H9/00
• CPC Class Codes: H03H 9/42 using surface acoustic waves devices for manipulating acoustic surface waves in general G10K11/36

Abstract

An ultrasonic structure which has a thin planar sheet of material forming a Lamb wave propagation medium The propagation medium is coated with a gel. The structure may also include a Lamb wave generator for generating Lamb waves in the propagation medium and an output device for producing an electrical signal representative of the propagation characteristics of the Lamb waves propagating along the propagation medium. A measuring device can be included to measure selected characteristics of the output electrical signal. The propagation medium has some physical characteristics that are determined by the value of a measurand acting on the medium and the determined physical characteristics determine the propagation characteristics of the Lamb waves which are propagated along the medium. When the sensor is acted on by a measurand to determine the physical characteristics of the propagation medium, the characteristics of the electrical signal are also determined. The measuring device measures the electrical signal and provides an indication of the measurand value.

Claims

1. An ultrasonic structure comprising:

a propagation medium comprising a thin planar sheet capable of supporting Lamb waves, said sheet having a thickness very much thinner than the wavelength of the Lamb waves to be propagated thereon, said propagation medium including on a surface thereof a layer of a low shear modulus material; and

electrical means coupled to the thin planar sheet of said propagation medium for producing Lamb waves in the propagation medium.

2. The structure as recited in claim 1, wherein the electrical means includes means for producing both symmetrical and antisymmetrical Lamb waves in the propagation medium.

3. The structure as recited in claim 2, wherein the propagation medium includes a layer of silicon nitride.

4. The structure as recited in claim 3, wherein the propagation medium includes a layer of piezoelectric material.

5. The structure as recited in claim 1 wherein said sheet has some physical characteristics determined by the value of a measurand acting thereon, said physical characteristics determining the propagation characteristics of Lamb waves to be propagated along the medium;

and further including output means on said sheet for producing an electrical signal representative of the determined propagation characteristics of the Lamb waves propagating along the propagation medium, and measuring means for measuring selected characteristics of said electrical signal, whereby when said structure is acted on by a measurand, the physical characteristics of said propagation medium are determined and said electrical signal characteristics are also determined, so that said measuring means indicates the value of the measurand.

6. The structure as recited in claim 5, wherein the output means includes a receiving transducer, coupled to the propagation medium, for producing an electrical signal representative of the Lamb waves propagating along said propagation medium;

the electrical means includes a launching transducer, coupled to the propagation medium, for generating Lamb waves in the propagation medium;

a feedback path between the receiving and launching transducers for providing feedback from the receiving transducer to the launching transducer;

a feedback amplifier in the feedback path for amplifying said electrical signal produced by the receiving transducer and fed back to the launching transducer, the structure forming an oscillator in which Lamb waves are continuously propagated along the propagation medium; and

the measuring means includes frequency measuring means for measuring the oscillation frequency.

7. The structure as recited in claim 6, including Lamb wave reflecting means for reflecting Lamb waves generated by the launching transducer that propagate in directions away from the receiving transducer, so that the reflected Lamb waves do not produce an output at the receiving transducer.

8. The structure as recited in claim 1 wherein at least a portion of the propagation medium is porous.

9. The structure as recited in claim 8 wherein the porous portion of the propagation medium is also permeable.

10. The structure as recited in claim 1 wherein a layer of sorptive material is disposed between said propagation medium and said layer of low shear modulus material.

11. The structure as recited in claim 1 wherein a sorptive material is dispersed throughout said layer of low shear modulus material.

12. The structure as recited in claim 1 wherein said layer of low shear modulus material is a material selected from the group consisting of agar, gelatin, polyacrylamide, polyvinylalcohol, alginate, and other gels formed from seaweed, siloxanes, polyvinyl chloride gels, pectin, and the glycoprotein-based gel, mucus.

13. The structure as recited in claim 1 wherein the propagation medium includes a means of heating said layer of low shear modulus material.

14. The structure as recited in claim 1 wherein said layer of low shear modulus material contains cells or living organisms.

15. The structure as recited in claim 1 wherein said layer of low shear modulus material is bounded by a solid backing or support.

16. The structure as recited in claim 1 wherein both surfaces are coated with a layer of a gel.

17. The structure as recited in claim 1 wherein the electrical means for producing waves is electrostrictive.

18. The structure as recited in claim 1 wherein the electrical means for producing waves is thermoelastic.

19. The structure as recited in claim 1, including Lamb-wave reflecting means to form a Lamb-wave resonator.

20. An ultrasonic sensor comprising:

a composite structure comprising (a) a supporting frame of a first material, and (b) a propagation medium comprising a thin planar sheet of a second different material capable of supporting Lamb waves, supported peripherally by said supporting frame, said sheet having a thickness very much thinner than the wavelength of Lamb waves to be propagated thereon and having some physical characteristics determined by the value of a measurand acting thereon, said physical characteristics determining the propagation characteristics of Lamb waves to be propagated along the medium, said propagation medium including on a surface thereof a layer of a gel;

electrical means coupled to the thin planar sheet of said propagation medium for producing Lamb waves in the propagation medium;

output means on said sheet for producing an electrical signal representative of the determined propagation characteristics of the Lamb waves propagating along the propagation medium; and

measuring means for measuring selected characteristics of said electrical signal,

whereby when said sensor is acted on by a measurand, the physical characteristics of said propagation medium are determined and said electrical signal characteristics are also determined, so that said measuring means indicates the value of the measurand.

21. The sensor as recited in claim 20, wherein there is a ground plane that is substantially coextensive with the propagation medium.

22. The sensor as recited in claim 20, wherein at least a portion of the propagation medium is porous.

23. The sensor as recited in claim 22, wherein the porous portion of the propagation medium is also permeable.

24. The sensor as recited in claim 20, wherein a layer of sorptive material is disposed between said propagation medium and said gel layer.

25. The sensor as recited in claim 20, wherein a sorptive material is dispersed throughout said gel layer.

26. The sensor as recited in claim 20 further including a layer of protective material as an outer surface on said gel layer.

27. The sensor as recited in claim 26, wherein said protective layer is a material selected from the group consisting of Teflon and silicone.

28. The sensor as recited in claim 20, wherein said gel layer is a material selected from the group consisting of agar, gelatin, polyacrylamide, polyvinylalcohol, alginate, and other gels formed from seaweed, siloxanes, polyvinyl chloride gels, pectin, and the glycoprotein-based gel, mucus.

29. The sensor as recited in claim 20, wherein the propagation medium includes a means of heating said gel layer.

30. The sensor as recited in claim 20, wherein said gel layer contains cells or living organisms.

31. The sensor as recited in claim 20, wherein said gel layer is bounded by a solid backing or support.

32. The sensor as recited in claim 20, wherein both surfaces of the propagation medium are coated with a layer of a gel.

33. The sensor as recited in claim 20 wherein the electrical means for producing waves is electrostrictive.

34. The sensor as recited in claim 20 wherein the electrical means for producing waves is thermoelastic.

35. The sensor as recited in claim 20, wherein the electrical means includes means for producing both symmetrical and antisymmetrical Lamb waves in the propagation medium.

36. The sensor as recited in claim 35, wherein the propagation medium includes a layer of silicon nitride.

37. The sensor as recited in claim 36, wherein the propagation medium includes a layer of piezoelectric material.

38. The sensor as recited in claim 38, wherein the output means includes a receiving transducer, coupled to the propagation medium, for producing an electrical signal representative of the Lamb waves propagating along said propagation medium,

the electrical means includes a launching transducer, coupled to the propagation medium, for generating Lamb waves in the propagation medium,

a feedback path between the receiving and launching transducers for providing feedback from the receiving transducer to the launching transducer, and

a feedback amplifier in the feedback path for amplifying said electrical signal produced by the receiving transducer and fed back to the launching transducer, the sensor forming an oscillator in which Lamb waves are continuously propagated along the propagation medium,

the measuring means includes frequency measuring means for measuring the oscillation frequency.

39. The sensor as recited in claim 38, including Lamb wave reflecting means for reflecting Lamb waves generated by the launching transducer that propagate in directions away from the receiving transducer, so that the reflected Lamb waves do not produce an output at the receiving transducer.

40. The sensor as recited in claim 38, wherein each transducer includes a pair of interdigital finger electrodes formed on one surface of the layer of piezoelectric material.

41. The sensor as recited in claim 40, wherein the propagation medium includes a ground plane comprising a layer of conducting material on the surface of the piezoelectric layer opposite the surface on which the transducer electrodes are deposited, said ground plane being restricted to areas substantially opposite the transducer electrodes.

42. An ultrasonic structure comprising:

a propagation medium comprising a thin planar sheet capable of supporting Lamb waves, said sheet having a thickness very much thinner than the wavelength of the Lamb waves to be propagated thereon, said propagation medium including on a surface thereof a layer of a low shear modulus material; and

optical means for the thermoelastic generation of Lamb waves in the propagation medium.