Vacuum processing apparatus
First Claim
1. A vacuum processing apparatus provided with a vacuum processing chamber which implements a required processing to an object of processing, and a pre-vacuum chamber configured so that it can be internally vacuum exhausted, with an object of processing being carried-in and -out of the vacuum processing chamber via the pre-vacuum chamber,said vacuum processing apparatus comprising a small space which can be airtightly sealed is provided inside said pre-vacuum chamber, so that the object of processing can be temporarily housed into said small space when there is vacuum exhaust from said pre-vacuum chamber and when there is the introduction of air to said pre-vacuum chamber.
1 Assignment
0 Petitions
Accused Products
Abstract
The present invention is a vacuum processing apparatus provided with a vacuum processing chamber which implements a required processing to an object of processing, and a pre-vacuum chamber (load-lock chamber) configured so that it can be internally vacuum exhausted, with an object of processing being carried-in and -out of the vacuum processing chamber via the pre-vacuum chamber, in which a small space which can be airtightly sealed is provided inside the pre-vacuum chamber, so that the object of processing can be temporarily withdrawn into and housed in the small space when there is vacuum exhaust from the pre-vacuum chamber and when there is the introduction of air to the pre-vacuum chamber. Thus, it is possible to prevent the adhesion to the processing object of particles which rise when air is introduced to the load-lock chamber and when air is exhausted from the load-lock chamber, and without having to perform slow exhaust and slow venting, while increases the throughput and the yield at the same time.
113 Citations
7 Claims
-
1. A vacuum processing apparatus provided with a vacuum processing chamber which implements a required processing to an object of processing, and a pre-vacuum chamber configured so that it can be internally vacuum exhausted, with an object of processing being carried-in and -out of the vacuum processing chamber via the pre-vacuum chamber,
said vacuum processing apparatus comprising a small space which can be airtightly sealed is provided inside said pre-vacuum chamber, so that the object of processing can be temporarily housed into said small space when there is vacuum exhaust from said pre-vacuum chamber and when there is the introduction of air to said pre-vacuum chamber.
Specification