Heat dissipating device
First Claim
1. A heat dissipating arrangement for semiconductor electronic components comprising:
- a chip of semiconductor material having a front surface with a semiconductor circuit component formed therein and a rear surface;
a plurality of heat dissipation grooves provided in said rear surface of said semiconductor chip;
at least one meltable substance disposed in said grooves with said at least one substance being a substance which is subjected to a heat absorbing phase conversion from solid to liquid when a predetermined temperature which is critical for operation of said semiconductor component is exceeded; and
a housing base fastened to said rear surface of said semiconductor chip.
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Accused Products
Abstract
Heat dissipating devices for electronic component semiconductor chips are provided in the form of channels or grooves which are either integrated in the underside of the semiconductor chip or are formed in an additional thin semiconductor chip which has larger dimensions than the component chip and which is disposed between the underside of the component chip and the mounting base for the component chip. The channels are filled with a meltable material which is subjected to a heat absorbing phase conversion at temperatures which are critical for semiconductor component operation. In this way, short-term heat peaks in particular, can be reliably dissipated. Preferably, the channels are formed by micromechanical etching techniques and are preferably filled to the desired degree by a spin coating process.
99 Citations
14 Claims
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1. A heat dissipating arrangement for semiconductor electronic components comprising:
- a chip of semiconductor material having a front surface with a semiconductor circuit component formed therein and a rear surface;
a plurality of heat dissipation grooves provided in said rear surface of said semiconductor chip;
at least one meltable substance disposed in said grooves with said at least one substance being a substance which is subjected to a heat absorbing phase conversion from solid to liquid when a predetermined temperature which is critical for operation of said semiconductor component is exceeded; and
a housing base fastened to said rear surface of said semiconductor chip. - View Dependent Claims (2, 3, 4, 5, 6, 13)
- a chip of semiconductor material having a front surface with a semiconductor circuit component formed therein and a rear surface;
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7. A heat dissipation arrangement for a semiconductor electronic component comprising:
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a housing base; a semiconductor heat dissipating chip having a rear surface fastened to said base and a front surface; a semiconductor component chip having a rear surface bonded to said front surface of said heat dissipating chip; a plurality of grooves formed in said rear surface of said heat dissipation chip; and a solid meltable material disposed in and at least partially filling said grooves, said material having a melting point less than a predetermined temperature critical for proper operation of said semiconductor component and undergoing a heat absorbing phase conversion from solid to liquid when heated to exceed said predetermined temperature. - View Dependent Claims (8, 9, 10, 11, 12, 14)
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Specification