Multilayer piezoelectric actuator stack and method for its manufacture

• US 5,245,734 A
• Filed: 10/26/1990
• Issued: 09/21/1993
• Est. Priority Date: 11/14/1989
• Status: Expired due to Fees

• Current Assignee: Battelle Memorial Institute
• Original Assignee: Battelle Memorial Institute
• Inventors: Issartel, Jean-Paul
• Primary Examiner(s): Budd, Mark O.
• Application Number:
  US07/603,432
• Time in Patent Office: 1,061 Days
• Field of Search: 310/357-359, 310/328, 310/366, 310/363, 310/364, 310/311, 29/25.35
• US Class Current: 29/25.35
• CPC Class Codes: H04R 17/08 signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously
• CPC Class Codes: H10N 30/067 Forming single-layered electrodes of multilayered piezoelectric or electrostrictive parts
• CPC Class Codes: H10N 30/50 having a stacked or multilayer structure
• CPC Class Codes: H10N 30/871 Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
• CPC Class Codes: Y10T 29/42 Piezoelectric device making

Abstract

Multilayer piezoactuators are made by stacking and pressing alternating layers of piezoceramic material and interdigital electrode material. The electrode structure is provided with pressure protected boundary discontinuities which form areas in which electrodes edges do not make contact with the common electrical collectors of the piezoactuators and in which the piezoceramic layers are prevented from touching one another.

Claims

1. A method of manufacturing a multilayer piezoceramic actuator stack comprising the steps of:

(a) forming leaves or tiles of piezoceramic in a plastic state by casting a layer of ceramic on a tape supporting a ceramic impregnated ribbon of wire or filament fabric, at least one edge of tape and ribbon being made flush together, laminating said ribbon and said tape cast ceramic layer together, drying said laminate, and cutting said laminate to thereby form said leaves or tiles;

(b) forming electrode material in fugitive or permanent state to be interposed between said piezoceramic tiles, said electrode material being in a given pattern provided with boundary discontinuities to define electrode free regions between said tiles;

(c) piling over each other a plurality of tiles and electrode material to thereby form a stack comprising, in alternating succession, even and odd-numbered electrodes interposed between piezoceramic layers, all even-numbered electrodes forming a first group, all odd-numbered electrodes forming another group, and said electrode pattern with boundary discontinuities of said electrodes of said first group being in reciprocal opposite configuration to said electrode pattern of said another group in a final actuator structure;

(d) pressing said stacked leaves into a compact block to effect integral binding of said tiles within said stack;

(e) firing to sinter said block and, when said electrode material is fugitive, volatilizing said fugitive electrode material thus providing voids in said ceramic in a form of said electrode pattern;

(f) filling discontinuities to become electrode free regions with pressure resistive material and, when voids in said form of said electrode pattern are present, infiltrating said voids with molten metal to thereby form final electrodes having said pattern;

(g) connecting said even-numbered electrodes to a common electric collector and said odd-numbered electrodes to another common collector electrode, said collector electrodes being applied over opposite sides of said stack block.

2. The method of claim 1, wherein said fabric is a metallic wire mesh, whereby said electrode material is permanent.

3. The method of claim 1, wherein said fabric comprises organic polymer monofilaments, whereby said polymer is volatilized during firing leaving a void pattern to be thereafter filled with metal by infiltration.

4. The method of claim 1, in which after steps (d) or (e) the compacted block is cut vertically, transversally to the stacked layers, to provide a plurality of actuator shaped blocks of cross-sectional area narrower than that of the original stack, each of said narrower blocks being thereafter terminated into actuator proper according to manufacturing steps (f) and (g).

5. The method of claim 4, in which the direction of cutting of the stacked block corresponds to two sets of parallel lines which intersect at right angle, the cross-sectional area of the narrower blocks of actuator format being square or retangular.

6. The method of claim 5, in which step (b) includes applying stripes of fugitive material on each piezoceramic leaf along the lines of one of said set of lines, the cutting of the compacted block and the burning of said fugitive material eventually resulting in the formation of grooves in staggered configuration on opposite sides of the narrower actuator formatted blocks, these grooves being thereafter filled with pressure resisting insulator material to effect individual insulation at the tip edge of each corresponding electrode layer of the actuator.