Corrosion resistant thin film thermocouples and method
First Claim
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1. Thermocouples comprising a junction and thin film thermoelements of ruthenium oxide and iridium oxide.
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Abstract
The invention relates to thermocouples which are formed from a junction of ruthenium oxide (RuO2) and iridium oxide (IrO2). The resulting thermocouple produces a typical electrical output of about 4.5 μV/k at 40° C. to about 4.1 μv/K at 200° C. The thermocouples are extremely resistant to corrosion and thus may be used for direct contact with corrosive environments such as halide containing acids, cyanides, chlorates or peroxides. Because the thermocouples can directly contact the environment, they are 100 to 1000 times faster than commercially available sheathed sensors.
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15 Claims
- 1. Thermocouples comprising a junction and thin film thermoelements of ruthenium oxide and iridium oxide.
- 9. A method of sensing the temperature of a corrosive environment comprising contacting the corrosive environment with a thermocouple formed of RuO2 --IrO2 and using an electrical output of said thermocouple as an indication of the temperature of the corrosive environment.
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