High-vacuum coating apparatus

  • US 5,254,169 A
  • Filed: 07/15/1992
  • Issued: 10/19/1993
  • Est. Priority Date: 03/10/1992
  • Status: Expired due to Term
First Claim
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1. High-vacuum coating apparatus for coating a film comprising:

  • an evacuable vacuum tank, mechanical pumps and at least one diffusion pump for evacuating the vacuum tank, a supply roll for unwinding a film, a take-up roll, a coating cylinder for guiding the film to the take-up roll, an evaporator bank disposed underneath the coating cylinder for the evaporation of the coating material, a partition wall for dividing the vacuum tank into a winding chamber having the supply roll and take-up roll and a coating chamber which contains the evaporator bank and into which at least one area of the coating cylinder, where the coating of the film takes place, extends facing the evaporator bank, the mechanical pumps being disposed for the evacuation of the winding chamber and the coating chamber, and the diffusion pump being connected exclusively to the coating chamber, the apparatus including a floor running unit having the partition wall including a bearing plate and a tank-end plate between which plates the partition wall is fastened, the vacuum tank having a wall and the apparatus including an inflatable tubular gasket, which therefore is variable in cross section, for sealing the partition wall from the wall of the vacuum tank, the tubular gasket having an interior having an atmosphere connection.

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