Method of fabricating electrostrictive-effect device

  • US 5,254,212 A
  • Filed: 05/06/1992
  • Issued: 10/19/1993
  • Est. Priority Date: 09/13/1990
  • Status: Expired due to Fees
First Claim
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1. A method of fabricating a lamination-type displacement device, comprising the steps of:

  • forming thin films of an electromechanical transducer material alternately with internal electrodes of a conductive material to form a laminate in which the internal electrodes are exposed at different parallel side surfaces;

    forming a protective film on and around alternate layers of the internal electrodes at one side surface;

    forming a protective film on and around the internal electrodes other than said internal electrodes at the other side surface;

    selectively polishing the side surfaces of the laminate except for the protective films; and

    removing the protective films.

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