Thick film accelerometer

  • US 5,277,064 A
  • Filed: 04/08/1992
  • Issued: 01/11/1994
  • Est. Priority Date: 04/08/1992
  • Status: Expired due to Fees
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First Claim
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1. A thick film accelerometer on an alumina substrate having opposed planar major surfaces, said accelerometer comprising:

  • an alumina substrate base portion;

    a support member integrally formed with said alumina substrate base portion;

    a U-shaped flexure member integrally formed with said alumina base portion essentially surrounding said support member so that a gap is provided substantially everywhere therebetween said U-shaped flexure member and said support member except at said alumina substrate base portion, whereby said U-shaped flexure member has an unsupported end capable of flexing under acceleration;

    a mass provided on the unsupported end of said U-shaped flexure member so as to be oppositely disposed to said alumina base portion; and

    means for detecting acceleration of said mass in a direction perpendicular to the major surfaces of said alumina substrate base portion and support member, wherein said means for detecting acceleration is provided on said U-shaped flexure member adjacent said alumina substrate base portion.

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