Combined semiconductor gas sensor
First Claim
1. A combined semiconductor gas sensor for measuring the density of a specific gas, comprising the combination of two portions, which portions are formed on a single substrate and are made of two different gas sensitive materials respectively, wherein the resistances of these two portions vary differently with the density of the specific gas;
- when said gas sensor is coupled into a detecting circuit, an output signal is led out from the junction of said two portions, wherein one of the portions serves as the load simultaneously, an absolute value of the temperature coefficient of the gas sensitive material constituting the portion serving as the load simultaneously is not greater than an absolute value of the temperature coefficient of the material constituting the other portion.
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Accused Products
Abstract
The present invention relates to a combined semiconductor gas sensor, this sensor is constituted by combining two portions, each of the portions is made of a different gas sensitive material, their resistance exhibit different variation with the variation of the density of a specific gas, a detecting signal is led out from the junction of the two portion. Because of the mutual compensation and propagation effect of the two portions of the above mentioned gas sensor, the stability and/or sensitivity as well as the stability to temperature and humidity and the initial relaxation time can be improved. Gas sensors of different characteristics can be obtained by different combinations of two different gas sensitive materials selected according to need.
25 Citations
24 Claims
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1. A combined semiconductor gas sensor for measuring the density of a specific gas, comprising the combination of two portions, which portions are formed on a single substrate and are made of two different gas sensitive materials respectively, wherein the resistances of these two portions vary differently with the density of the specific gas;
- when said gas sensor is coupled into a detecting circuit, an output signal is led out from the junction of said two portions, wherein one of the portions serves as the load simultaneously, an absolute value of the temperature coefficient of the gas sensitive material constituting the portion serving as the load simultaneously is not greater than an absolute value of the temperature coefficient of the material constituting the other portion.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A combined gas sensor for measuring the density of a specific gas, the gas sensor comprising:
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a first portion of a gas sensitive material, the first portion having a first end and a second end, such that when the first portion is exposed to the specific gas, the resistance between the first and second ends across the first portion varies with the density of the specific gas; a second portion of a gas sensitive material, the second portion having a first end and a second end, such that when the second portion is exposed to the specific gas, the resistance between the first and second ends of the second portion across the second portion varies with the density of the specific gas differently from said resistance across the first portion; a first electrode connected to the first end of the first portion; a second electrode connected to the second end of the second portion, the first and second electrodes being for passing a current therebetween through the first and second portions; and a third electrode connected to the second end of the first portion and the first end of the second portion, for providing an output signal indicative of the density of the specific gas. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification