Method of making atomically sharp tips useful in scanning probe microscopes

• US 5,302,239 A
• Filed: 05/15/1992
• Issued: 04/12/1994
• Est. Priority Date: 05/15/1992
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Roe, Fred L., Tjaden, Kevin
• Primary Examiner(s): DANG, THI D
• Application Number:
  US07/884,482
• Time in Patent Office: 697 Days
• Field of Search: 156/657, 156/659.1, 156/661.1, 156/662, 156/643, 156/646, 250/306, 250/311
• US Class Current: 216/11
• CPC Class Codes: G01Q 70/16 Probe manufacture
• CPC Class Codes: H01J 2201/30457 Diamond
• CPC Class Codes: H01J 9/025 of field emission cathodes

Abstract

An in situ plasma dry etching process for the formation of atomically sharp tips for use in high resolution microscopes in which i) a mask layer is deposited on a substrate, ii) a photoresist layer is patterned superjacent the mask layer at the sites where the tips are to be formed, iii) the mask is selectively removed by plasma etching, iv) after which the substrate is etched in the same plasma reacting chamber, thereby creating sharp microscope tips.

Claims

1. A process for the formation of microtips, said process comprising the following steps:

exposing a patterned substrate to a plasma, thereby creating microtips having a tip size less than 10Å

; and

segmenting the substrate in order to separate at least some of the plurality of microtips from each other.

2. The process according to claim 1, wherein said plasma comprises a halogenated species.

3. The process according to claim 2, wherein said halogenated species comprises at least one of chlorine and fluorine.

4. The process according to claim 1, wherein said patterned substrate comprises a mask layer and a photoresist layer.

5. The process according to claim 4, wherein said mask layer is an oxide.

6. The process according to claim 5, further comprising the steps of:

stripping said mask layer after subjecting said substrate to said plasma.

7. The process according to claim 6, wherein said stripping step is a wet etch, said wet etch comprising hydrogen fluoride.

8. A method for controlling aspect ratios useful for forming very sharp asperities comprising the following step:

isotropically etching a substrate having a mask layer disposed thereon, thereby forming said sharp asperities in a single etch step, said sharp asperities having a tip size of less than 10Å

.

9. The process according to claim 8, wherein a plasma is used to etch said substrate, said plasma comprising etchant gases, said aspect ratio being controlled by said etchant gas flow.

10. The process according to claim 9, wherein said mask layer is an oxide.

11. The process according to claim 10, wherein said etchant gases comprises halogenated species.

12. The process according to claim 11, wherein said halogenated species comprising at least one of chloride and fluorine.

13. The process according to claim 12, further comprising the step of:

removing said mask layer using a wet etch, said wet etch comprising hydrogen fluoride.

14. The process according to claim 13, further comprising the step of:

cooling said substrate while said substrate is being etched.

15. The process according to claim 14, wherein a photoresist layer is used to pattern said mask layer.