Anodic vacuum arc deposition system

• US 5,302,271 A
• Filed: 08/25/1992
• Issued: 04/12/1994
• Est. Priority Date: 08/25/1992
• Status: Expired due to Fees

• Current Assignee: Northeastern University
• Original Assignee: Northeastern University
• Inventors: Meassick, Steven, Chan, Chung
• Primary Examiner(s): Weisstuch, Aaron
• Application Number:
  US07/934,925
• Time in Patent Office: 595 Days
• Field of Search: 204/192.38, 204/298.41, 427/580
• US Class Current: 204/298.41
• CPC Class Codes: C23C 14/325 Electric arc evaporation
• CPC Class Codes: H01J 37/32055 Arc discharge

Abstract

An anodic vacuum arc deposition system for rapidly depositing a high quality, small grain size, coating on a workpiece. The anodic vacuum arc deposition system includes an arc initiator and an anodic electrode having a continuous feed. The anodic vacuum arc deposition system may be configured with a coaxial anode and cathode. A plurality of coaxial electrodes may be used to deposition coat a large area and/or to sequentially deposit a series of layers each of a different material.

Claims

1. A liquid anodic arc deposition system for depositing a material on a substrate comprising:

a vacuum chamber;

an anode assembly comprising;

an anode of spooled wire of said material to be deposited, said spooled wire having a free end and a spooled end; and

a cathode assembly comprising;

a cathode; and

an initiator electrode juxtaposed with and separated from

said cathode by an insulator,

said anode assembly and said cathode assembly located within said vacuum chamber in close juxtaposition,

said anode, in use, forming a liquid region from which the deposition material is vaporized.

2. The liquid anodic arc deposition system of claim 1 wherein said anode assembly further comprises a tubular insulator having a first end and a second end, said free end of said anode of spooled wire passing through said first end of said tubular insulator and terminating adjacent said second end of said tubular insulator.

3. The liquid anodic arc deposition system of claim 1 wherein said anode assembly further comprises an insulating limiter having a limiter aperture, said insulating limiter positioned adjacent said second end of said tubular insulator such that said free end of said anode terminates adjacent said limiter aperture.

4. The liquid anodic arc deposition system of claim 1 wherein said cathode assembly further comprises a shield having a shield aperture, said shield partially surrounding said cathode and initiator electrode, said shield aperture being oriented so as to permit an arc to form between said anode and said cathode.

5. The liquid anodic arc deposition system of claim 1 further comprising an arc initiator current supply connected between said initiator electrode and said cathode electrode, a bias voltage supply connected between said substrate and said cathode and an arc current supply connected between said cathode and said anode.

6. The liquid anodic arc deposition system of claim 5 wherein said arc current supply comprises an arc initiation portion and an arc sustaining portion.

7. The liquid anodic arc deposition system of claim 5 wherein said arc initiator current supply comprises a high voltage source connected in series with a spark gap and connected in parallel with a capacitor.

8. A liquid anodic arc deposition system electrode assembly comprising:

an insulating tube having a first end and a second end;

an anode of spooled wire of material to be deposited, said anode of spooled wire having a free end and a spooled end, said free end of said anode passing through said first end of said insulating tube and terminating at said second end of said insulating tube;

an annular cathode positioned concentrically about said insulating tube; and

an annular initiator electrode positioned concentrically about said insulating tube and separated from said annular cathode by an insulator,

said anode, in use, forming a liquid region from which the deposition material is vaporized.

9. The liquid anodic arc deposition system electrode assembly of claim 8 further comprising an insulating limiter having a first limiter aperture and a second limiter aperture, said insulating limiter positioned adjacent said second end of said insulating tube such that said free end of said anode terminates adjacent said first limiter aperture and said second limiter aperture is positioned to permit an arc to form between said anode and said cathode.

10. The liquid anodic arc deposition system electrode assembly of claim 8 further comprising a high thermal capacity material positioned between said anode and said insulating tube so as to prevent heat damage to said insulating tube.

11. The liquid anodic arc deposition system electrode assembly of claim 10 wherein said high thermal capacity material positioned between said anode and said insulating tube so as to prevent heat damage to said insulating tube is tungsten.

12. The liquid anodic arc deposition system electrode assembly of claim 10 wherein said high thermal capacity material positioned between said anode and said insulating tube so as to prevent heat damage to said insulating tube is carbon.

13. A liquid anodic arc deposition system comprising:

a vacuum chamber;

a plurality of anodic arc deposition system electrodes each comprising;

an insulating tube having a first end and a second end;

an anode of spooled wire or material to be deposited, said anode of spooled wire having a free end and a spooled end, said free end of said anode passing through said first end of said insulating tube and terminating at said second end of said insulating tube;

an annular cathode positioned concentrically about said insulating tube; and

an annular initiator electrode positioned concentrically about said insulating tube and separated from said annular cathode by an insulator,

said plurality of said anodic arc deposition system electrodes located within said vacuum chamber and arranged in close juxtaposition, so as to provide a substantially even deposition coating to said substrate,

each said anode, in use, forming a liquid region from which the deposition material is vaporized.

14. The liquid anodic arc deposition system electrode assembly of claim 13 wherein each anodic arc deposition system electrode further comprises an insulating limiter having a first limiter aperture and a second limiter aperture, said insulating limiter positioned adjacent said second end of said insulating tube such that said free end of each said anode terminates adjacent said first limiter aperture and said second limiter aperture is positioned to permit an arc to form between said anode and said cathode.