Method of fabricating thin film sensors

  • US 5,391,250 A
  • Filed: 03/15/1994
  • Issued: 02/21/1995
  • Est. Priority Date: 03/15/1994
  • Status: Expired due to Term
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First Claim
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1. A method of making a thin film electrochemical sensor, said method comprising the steps of:

  • applying a curable adhesive in a closed loop pattern to a flat surface of a rigid substrate;

    assembling a base layer of insulative sheet material with the substrate, with the adhesive interposed between the substrate and the base layer generally at the perimeter of the base layer, so that a shallow cavity is formed between the substrate and a central portion of the base layer;

    applying heat and pressure to the assembled base layer and substrate to expel air from the cavity and to position the central portion of the base layer in intimate surface contact with the substrate, and further to cure the adhesive to seal the cavity and thereby prevent air return flow into the cavity;

    forming at least one conductive sensor element on the base layer;

    forming a cover layer of insulative material to cover the at least one conductive sensor element and to extend beyond the marginal edges thereof in sealed contact with the base layer; and

    removing the sensor from the substrate by cutting through the cover and base layers along a line circumscribing and spaced outwardly from the at least one sensor element.

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