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Probe system with automatic control of contact pressure and probe alignment

  • US 5,394,100 A
  • Filed: 05/06/1993
  • Issued: 02/28/1995
  • Est. Priority Date: 05/06/1993
  • Status: Expired due to Fees
First Claim
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1. A probe system for probing a device under test (DUT) comprising:

  • DUT support means;

    a plurality of probe needles, each said probe needle movable with respect to said DUT support means, said probe needles positioned adjacent a surface of a said DUT and along a Z-dimension axis that extends orthogonally from said surface;

    motor means for providing relative movement at least along said Z axis between each said probe needle and said DUT support means;

    variable focus imaging means positioned along said Z axis; and

    control means for causing said variable focus imaging means to provide images of both said surface of said DUT and at least a said probe needle, said control means responsive to a determined distance between focal planes of said images to cause said motor means to move said probe needle and said DUT surface into physical engagement, said motor means controlled to provide a distance of relative movement between said probe needle and said DUT surface that is greater than said determined distance between focal planes of said images, thereby creating a predetermined contact pressure between said probe needle and said DUT surface.

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