Linear polarization of semiconductor laser

• US 5,412,680 A
• Filed: 03/18/1994
• Issued: 05/02/1995
• Est. Priority Date: 03/18/1994
• Status: Expired due to Term

• Current Assignee: Clelo Communications Incorporated, Optical Communication Products Incorporated (KOCH Industries Incorporated)
• Original Assignee: Photonic Research (Photonic Electronic Limited)
• Inventors: O'Neill, Thomas J. Jr., Swirhun, Stanley E.
• Primary Examiner(s): Epps, Georgia Y.
• Application Number:
  US08/210,526
• Time in Patent Office: 410 Days
• Field of Search: 372/45, 372/46, 372/96, 372/27, 372/99, 372/50, 372/47
• US Class Current: 372/45.01
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: H01S 5/18308 having a special structure for lateral current or light confinement
• CPC Class Codes: H01S 5/18333 only above the active layer
• CPC Class Codes: H01S 5/18338 Non-circular shape of the structure
• CPC Class Codes: H01S 5/18355 having a defined polarisation
• CPC Class Codes: H01S 5/18394 Apertures, e.g. defined by the shape of the upper electrode
• CPC Class Codes: H01S 5/3404 influencing the polarisation
• CPC Class Codes: H01S 5/423 having a vertical cavity

Abstract

This invention discloses vertical cavity surface emitting lasers (VCSELs) formed to emit optical radiation that has a controlled direction of polarization. In one embodiment, a VCSEL has an active region that contains at least one strained semiconductor layer which has a preferred direction of electrical conductivity due to the strain. As a result, the optical radiation emitted from the VCSEL has a direction of polarization that is parallel to the preferred direction of conductivity. In another embodiment, a VCSEL has an elongated active region, and the direction of polarization of the radiation emitted from the VCSEL is parallel to a longitudinal axis of the active region. The invention also discloses a VCSEL array comprising vertical cavity surface emitting lasers having elongated active regions. By forming the elongated active regions parallel to each other, the array emits optical radiation having parallel polarization. Alternatively, the array may be formed so that the elongated active regions of adjacent VCSELs of the array are perpendicular to each other. As a result, adjacent VCSELs in the array emit optical radiation having orthogonal polarizations.

Claims

1. A vertical cavity surface emitting laser emitting optical radiation at a wavelength, λ

, comprising;

first and second parallel mirrors forming therebetween an optical cavity; and

an active region disposed between the mirrors, the active region comprising at least one strained semiconductor layer, the strained semiconductor layer having a preferred direction of electrical conductivity substantially along a first direction parallel to the mirrors, and said laser emitting optical radiation having a polarization substantially parallel to this first direction.

2. The laser of claim 1 wherein the active region comprises at least one quantum well, the quantum well comprising a first semiconductor layer interposed between second and third semiconductor layers, the first semiconductor layer having a bulk lattice constant substantially different from the lattice constants of the second and third semiconductor layers, thereby generating a strain in the first semiconductor layer.

3. The laser of claim 2 wherein the first semiconductor layer comprises substantially In.sub.(1-x) Ga_x As where x is a value within the range of 0≦

x≦

1, and the second and third semiconductors comprise substantially GaAs.

4. The laser of claim 3 wherein the first semiconductor comprises substantially In_1-x Ga_x As, and has a thickness substantially between the thickness at which dislocations are formed predominantly in one crystal lattice direction and the thickness where such dislocations are formed in a plurality of crystal lattice directions.

5. The laser of claim 1 further comprising a first spacer disposed between the first mirror and the active region, and a second spacer disposed between the active region and the second mirror.

6. The laser of claim 1 further comprising a substrate disposed under the first mirror.

7. The laser of claim 1 wherein the first mirror is a semiconductor distributed Bragg reflector comprising a plurality of alternating semiconductor layers having high and low indices of refraction, each layer having a thickness of λ

/4n where n is the index of refraction of the layer.

8. A vertical cavity surface emitting laser emitting optical radiation having a wavelength, λ

, comprising;

first and second parallel mirrors forming therebetween an optical cavity; and

an elongated active region disposed between the mirrors, the elongated active region having longitudinal and transverse axes oriented in directions substantially perpendicular to the direction of emitted optical radiation, the dimension of the active region along the transverse axis being sufficiently small that the laser emits optical radiation having substantially a fundamental mode along the transverse axis and the optical radiation having a direction of polarization substantially parallel to the longitudinal axis.

9. The laser of claim 8 further comprising an implanted current confinement region extending laterally from the periphery of the active region.

10. The laser of claim 8 further comprising a plurality of implantation regions distributed along the periphery of the active region and symmetric to the longitudinal and transverse axes.

11. The laser of claim 8 further comprising a contact layer formed on the second mirror, the contact layer having a cross-shaped aperture vertically and symmetrically aligned to the active region, said contact layer overlapping the active region at four locations symmetric to the longitudinal and transverse axes.

12. The laser of claim 8 further comprising two etched vertical side walls formed at opposite ends of the longitudinal axis of the active region.

13. The laser of claim 8 wherein the dimension of the active region along the transverse axis is no greater than 6 μ

m.

14. The laser of claim 8 wherein the dimension of the active region along the longitudinal axis is approximately 20 μ

m.

15. A vertical cavity surface emitting laser array comprising:

a plurality of vertical cavity surface emitting lasers integrally formed on a substrate, each of the lasers having an elongated active region, each elongated active region having longitudinal and transverse axes oriented in directions substantially perpendicular to the direction in which the laser emits optical radiation, the dimension of each active region along the transverse axis being sufficiently small that each laser emits optical radiation having substantially a fundamental mode along the transverse axis, and the optical radiation from each laser having a direction of polarization substantially parallel to the longitudinal axis of the active region of the laser.

16. The laser array of claim 15 wherein the elongated active region of each laser of the array is formed parallel to the elongated active regions of the other lasers of the array and the direction of polarization of the optical radiation from each laser is parallel.

17. The array of claim 15 wherein adjacent lasers of the array have elongated active regions perpendicular to each other such that each laser emits optical radiation having a direction of polarization that is perpendicular to the direction of polarization of the optical radiation from any adjacent laser(s).

18. The array of claim 15 wherein the dimension of each active region along the transverse axis is no greater than 6 μ

m.

19. The array of claim 15 wherein the dimension of each active region along the longitudinal axis is approximately 20 μ

m.