Apparatus for plasma enhanced chemical vapor deposition comprising shower head electrode with magnet disposed therein

• US 5,433,786 A
• Filed: 12/20/1993
• Issued: 07/18/1995
• Est. Priority Date: 08/27/1993
• Status: Expired due to Term

• Current Assignee: The Dow Chemical Company (Dow, Inc.)
• Original Assignee: The Dow Chemical Company (Dow, Inc.)
• Inventors: Hu, Ing-Feng, Tou, James C.
• Primary Examiner(s): Kunemund, Robert
• Assistant Examiner(s): BASKIN, JONATHAN
• Application Number:
  US08/169,786
• Time in Patent Office: 575 Days
• Field of Search: 118/723 E, 118/723 ER, 118/723 R, 118/715, 156/345, 204/298.37
• US Class Current: 118/723.00E
• CPC Class Codes: C23C 16/30 Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
• CPC Class Codes: C23C 16/45561 Gas plumbing upstream of the reaction chamber
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/5096 Flat-bed apparatus
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/3266 Magnetic control means

Abstract

An apparatus useful in preparing a coated substrate is disclosed. The substrate is coated with a plasma generated polymer containing Si, O, C and H in specific atom ratio wherein the polymer also contains certain functional groups. A power density of about 106 to about 108 J/Kg is employed in the plasma polymerization process. The apparatus comprises a plasma generating vacuum reaction vessel utilizing parallel plate electrodes. One of the electrodes comprises a magnetically enhanced shower head. A magnet is positioned in the interior of the shower head in contact with both the inner surfaces of the upper and lower portion thereof to concentrate the magnetic field above the upper surface of the shower head.

Claims

1. An apparatus for generating a plasma which utilizes parallel plate electrodes comprising as the cathode, a planar shower head electrode containing in the shower head, a means for generating a magnetic field above the surface of the cathode, a means for injecting gaseous reactants through the interior of the cathode and out through the surface of said cathode said means directing substantially all of said reactants through said magnetic field and said means for generating a magnetic field comprising a magnet situated internally in said shower head in contact with an inner upper surface of the cathode, said magnet having sufficient strength to generate at least 100 gauss.