Triggered vacuum anodic arc

• US 5,441,624 A
• Filed: 04/11/1994
• Issued: 08/15/1995
• Est. Priority Date: 08/25/1992
• Status: Expired due to Fees

• Current Assignee: Northeastern University
• Original Assignee: Northeastern University
• Inventors: Xia, Zhong-Yi, Allen, Ryne C., Chan, Chung
• Primary Examiner(s): Weisstuch, Aaron
• Application Number:
  US08/225,844
• Time in Patent Office: 491 Days
• Field of Search: 204/192.38, 204/298.41, 427/580
• US Class Current: 204/298.41
• CPC Class Codes: C23C 14/325 Electric arc evaporation
• CPC Class Codes: H01J 37/32055 Arc discharge

Abstract

An anodic vacuum arc deposition system for rapidly depositing a high quality, small grain size, coating on a workpiece. The anodic vacuum arc deposition system includes an arc initiator and an anodic electrode having a continuous feed. The anodic vacuum arc deposition system may be configured with a coaxial anode and cathode. A plurality of coaxial electrodes may used to deposition-coat a large area and/or to sequentially deposit a series of layers each of a different material. In one embodiment, a low current triggered anodic vacuum arc with a continuous wire feed mechanism provides the user with a self-contained high differential metal plasma spray. This apparatus provides coatings with properties similar to coatings from a basic anodic arc deposition source but can be self-ignited, continuously run, and made highly mobile for greater coverage control. An alternative embodiment of this device incorporates a cathodic arc source which supplies ions to both ignite the anodic arc and to enhance the ion population of the anodic arc metal flux for greater control over the deposition process via substrate biasing and magnetic focusing, and the degree of ionization at the substrate.

Claims

1. A low current anodic vacuum arc assembly, comprising:

a cathode assembly comprising;

a high voltage cathode defining a cavity and an orifice extending through said high voltage cathode to said cavity; and

an initiator electrode positioned proximate said high voltage cathode and insulated from said high voltage cathode; and

an anode assembly comprising;

a continuous, consumable anode having a free end, said free end of said anode positioned within said cavity of said high voltage cathode in close juxtaposition with said initiator electrode and said orifice.

2. The low current anodic vacuum arc assembly of claim 1, wherein said initiator electrode is positioned within said orifice.

3. The low current anodic vacuum arc assembly of claim 1, wherein said initiator electrode is positioned adjacent to said orifice.

4. The low current anodic vacuum arc assembly of claim 1, wherein said high voltage cathode is cup-shaped.

5. A triggered anodic arc deposition system for depositing material onto a substrate, comprising:

a vacuum chamber;

a cathode assembly comprising;

a high voltage cathode defining a cavity and an orifice extending through said high voltage cathode to said cavity; and

an initiator electrode positioned proximate said high voltage cathode and insulated from said high voltage cathode; and

an anode assembly comprising;

a continuous, consumable anode having a free end, said free end of said anode positioned within said cavity of said high voltage cathode in close juxtaposition with said initiator electrode and said orifice, said continuous, consumable anode, in use, forming a liquid region from which the deposition material is vaporized and deposited onto said substrate.

6. The triggered anodic arc deposition system of claim 5, wherein said initiator electrode is positioned within said orifice.

7. The triggered anodic arc deposition system of claim 5, wherein said continuous, consumable anode comprises spooled wire.

8. The triggered anodic arc deposition system of claim 5, further comprising a high voltage trigger circuit in electrical communication with said initiator electrode.

9. A low current anodic vacuum arc assembly, comprising:

a cathode assembly comprising;

a cup-shaped high voltage cathode defining a cavity and an orifice extending through said cathode into said cavity; and

an initiator electrode positioned on the inner surface of said cup-shaped high voltage cathode and adjacent said orifice; and

an anode assembly comprising;

a continuous, consumable anode having a free end, said free end of said anode positioned within said cup-shaped cathode in close juxtaposition with said initiator electrode and said orifice.

10. The low current anodic vacuum arc assembly of claim 9, wherein said continuous, consumable anode comprises spooled wire.

11. The low current anodic vacuum arc assembly of claim 9, further comprising a high voltage trigger circuit.

12. An anodic vacuum arc, assembly having an anode, a cathode, and a power supply, said power supply comprising:

a power source having a first terminal and a second terminal, said second terminal in electrical communication with said anode;

an inductor having a first terminal and a second terminal, said first terminal in electrical communication with said first terminal of said power source, said second terminal of said inductor in electrical communication with said cathode; and

a spark gap having a first terminal in electrical communication with said cathode and a second terminal in electrical communication with ground.

13. The assembly of claim 12, wherein said second terminal of said power source is in electrical communication with said anode through a second inductor connected in series between said anode and said second terminal of said power source.

14. The assembly of claim 13, further comprising a second spark gap having a first terminal in electrical communication with said anode and a second terminal in electrical communication with ground.

15. The assembly of claim 12, further comprising:

a diode having an anode and a cathode, said cathode of said diode in electrical communication with said cathode of said anodic vacuum arc assembly; and

a second power source having a first terminal in electrical communication with said anode of said diode and a second terminal in electrical communication with said anode of said anodic vacuum arc assembly; and

a metal oxide varistor connected in parallel with said second power source.

16. A triggered anodic arc deposition system for depositing material onto a substrate, comprising:

a vacuum chamber;

a cathode assembly comprising;

a cup-shaped high voltage cathode defining a cavity and an orifice extending through said cathode into said cavity; and

an initiator electrode positioned proximate said high voltage cathode; and

an anode assembly comprising;

a continuous, consumable anode having a free end, said free end of said anode positioned within said cup-shaped cathode in close juxtaposition with said initiator electrode and said orifice, said continuous, consumable anode, in use, forming a liquid region from which the deposition material is vaporized and deposited onto a substrate, said anode assembly and said cathode assembly mounted on a robotic arm.

17. The triggered anodic arc deposition system of claim 16, wherein said initiator electrode is positioned within said orifice.

18. The triggered anodic arc deposition system of claim 16, wherein said continuous, consumable anode comprises spooled wire.

19. The triggered anodic arc deposition system of claim 16, further comprising a high voltage trigger circuit.

20. A deposition system for depositing a material on a substrate, comprising:

a vacuum chamber;

an anodic arc source positioned within said vacuum chamber, said anodic arc source comprising an anode and a cathode;

a cathodic arc ion source comprising an ion generator;

a curved magnetic duct having a first end and a second end, said cathodic arc ion source positioned within said first end of said magnetic duct, said second end of said magnetic duct opening into said vacuum chamber, said magnetic duct comprising a curved tube surrounded by coils of wire positioned to generate a solenoidal magnetic field within said curved tube, said magnetic field adjustable to select ions generated by said cathodic arc source having a predetermined energy, said selected ions thereby flowing through said magnetic duct into said vacuum chamber and impinging on said substrate.

21. The deposition system of claim 20, wherein said ion generator further comprises:

a cathode assembly comprising

a material to be ionized mounted on a conductive cathodic base, said base including a cooling device;

an anode in close juxtaposition with and enclosing said cathode assembly, said anode defining an orifice adjacent to said material to be ionized; and

a trigger electrode adjacent to but insulated from said material to be ionized.

22. The deposition system of claim 20, wherein said curved magnetic duct is curved approximately 60 degrees and wherein said coils of wire positioned to generate said solenoidal magnetic field comprise approximately 200 turns of said coils wound around said tube, said coils when connected to a power source, generating a substantially axially uniform solenoidal magnetic field within said magnetic duct.

23. The deposition system of claim 20, wherein said curved magnetic duct further comprises at least one baffle positioned within said magnetic duct between said ion generator and said second end of said magnetic duct.

24. A deposition system for depositing carbon nitride on a substrates, comprising:

a vacuum chamber;

an anodic arc source positioned within said vacuum chamber, said anodic arc source comprising an anode and a cathode;

a cathodic arc ion source comprising a carbon ion generator;

a curved magnetic duct having a first end and a second end, said cathodic arc ion source positioned within said first end of said magnetic duct, said second end of said magnetic duct opening into said vacuum chamber, said magnetic duct comprising a curved tube surrounded by coils of wire positioned to generate a solenoidal magnetic field within said curved tube, said magnetic field adjustable to select ions generated by said cathodic arc source having a predetermined energy, said selected ions thereby flowing through said magnetic duct into said vacuum chamber and impinging on said substrate; and

a working gas source, wherein said working gas is N₂.

25. A deposition system for depositing titanium nitride on a substrate, comprising:

a vacuum chamber;

an anodic arc source positioned within said vacuum chamber, said anodic arc source comprising an anode and a cathode;

a cathodic arc ion source comprising a titanium ion generator;

a curved magnetic duct having a first end and a second end, said cathodic arc ion source positioned within said first end of said magnetic duct, said second end of said magnetic duct opening into said vacuum chamber, said magnetic duct comprising a curved tube surrounded by coils of wire positioned to generate a solenoidal magnetic field within said curved tube, said magnetic field adjustable to select ions generated by said cathodic arc source having a predetermined energy, said selected ions thereby flowing through said magnetic duct into said vacuum chamber and impinging on said substrate; and

a working gas source, wherein said working gas is N₂.