Resist removing method, and curable pressure-sensitive adhesive, adhesive sheets and apparatus used for the method

  • US 5,466,325 A
  • Filed: 08/11/1994
  • Issued: 11/14/1995
  • Est. Priority Date: 06/02/1993
  • Status: Expired due to Term
First Claim
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1. A resist-removing method, which comprises:

  • a step of adhering an adhesive tape having a curable pressure-sensitive adhesive layer which contains a non-volatile compound having a good affinity with a resist material and wherein said pressure sensitive adhesive layer has an initial modulus of elasticity of at least 0.5 g/mm2, and is prepared such that its modulus of elasticity after curing is at least 5 times its modulus of elasticity before curing, on an upper surface of a resist pattern formed on an article,a step of transferring and diffusing the non-volatile compound into the resist pattern,a step of applying a curing treatment to the adhesive after the step of adhering the adhesive tape, anda step of peeling off the resist pattern together with the adhesive tape.

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