Double reflection cathodoluminescence detector with extremely high discrimination against backscattered electrons
First Claim
1. Cathodoluminescence detector apparatus for the vacuum chamber specimen stage of an electron microscope being used for cathodoluminescence microscopy and analysis, comprising:
- a) an adaptor unit for mounting the apparatus on said vacuum chamber specimen stage and having means for supporting a specimen;
b) at least one photosensitive member responsive to radiation emitted from a specimen being scanned by an electron beam of the electron microscope;
c) means secured to said adaptor unit for supporting said at least one photosensitive member;
d) means for coupling a detection signal from said at least one photosensitive member;
e) double reflecting means located adjacent said specimen and said at least one photosensitive member and having respective reflective surfaces for reflecting radiation emitted from said specimen to said photosensitive member and collecting backscattered electrons from said specimen for removal, said double reflecting means further comprising,f) parabolic reflector means for receiving the radiation from said specimen, andg) planar reflector means for receiving the radiation from said first reflector means and then directing the reflected radiation to said photosensitive member.
1 Assignment
0 Petitions
Accused Products
Abstract
A parabolic reflector and an inclined planar light reflector in a cathodoluminescence detector are integrated with a set of photo-sensitive solid-state detector cells mounted in quadrature on a supporting plate, and supported by an electron microscope vacuum chamber specimen stage adaptor unit. Designed for CL emission operation in an electron microscope, the parabolic light reflector, the inclined planar light reflector and the photo-sensitive, solid-state detector cells are optically aligned and mechanically combined through the supporting plate of the detector cells. A readily exchangeable unit is thus obtained. The unit is further supported by the specimen stage adaptor unit so as to obtain a mechanical unit which can easily be mounted in and removed from any standard electron microscope vacuum chamber stage as a single integrated unit.
33 Citations
14 Claims
-
1. Cathodoluminescence detector apparatus for the vacuum chamber specimen stage of an electron microscope being used for cathodoluminescence microscopy and analysis, comprising:
-
a) an adaptor unit for mounting the apparatus on said vacuum chamber specimen stage and having means for supporting a specimen; b) at least one photosensitive member responsive to radiation emitted from a specimen being scanned by an electron beam of the electron microscope; c) means secured to said adaptor unit for supporting said at least one photosensitive member; d) means for coupling a detection signal from said at least one photosensitive member; e) double reflecting means located adjacent said specimen and said at least one photosensitive member and having respective reflective surfaces for reflecting radiation emitted from said specimen to said photosensitive member and collecting backscattered electrons from said specimen for removal, said double reflecting means further comprising, f) parabolic reflector means for receiving the radiation from said specimen, and g) planar reflector means for receiving the radiation from said first reflector means and then directing the reflected radiation to said photosensitive member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
-
Specification